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MEMS biaxial resonant accelerometer
, 2011 A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by means of elastic elements in such a way as to be suspended above the substrate, the elastic elements enabling inertial movements of detection of the inertial mass along a first axis of detection and a ...
COMI, CLAUDIA +2 more
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A novel resonant accelerometer based on mode localization of weakly coupled resonators
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. To the best of the authors' knowledge, it is the first time that this principle is experimentally demonstrated for an accelerometer.
Zhang, Hemin +5 more
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A Seismic-Grade Resonant MEMS Accelerometer
Journal of Microelectromechanical Systems, 2014 We report on the characterization of a high-resolution micromachined resonant accelerometer fabricated in an SoI-microelectromechanical (MEMS) foundry process. A prototype device demonstrated scale factor of 142.8 Hz/m/s 2 , dynamic range of >140 dB, and noise-limited resolution that is comparable with existing high-resolution macroscale seismometers.
null Xudong Zou +2 more
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A micromachined resonant accelerometer
SPIE Proceedings, 2006Micromechanical resonant sensors are very attractive for high-precision measurement applications due to their high sensitivity, direct frequency output and large dynamic range. This paper presents a high accuracy micromechanical resonant accelerometer on basis of detailed investigation.
Jie Ren +3 more
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A MEMS resonant accelerometer for low-frequency vibration detection
Sensors and Actuators A: Physical, 2018 According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators.
Shudong Wang +2 more
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Microwave resonator accelerometer
The Journal of the Acoustical Society of America, 1995A microwave resonator accelerometer including a microwave resonant cavity having a predetermined resonant frequency; the cavity including a flexible portion; a proof mass fixed to the flexible portion for changing the geometry and establishing a new resonant frequency of the cavity in response to an acceleration force on the proof mass; a microwave ...
Anthony Petrovich, Marc Weinberg
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Design of a Resonant Accelerometer
Advanced Materials Research, 2012A resonant accelerometer was designed in order to overcome low output precision characteristics of the sensors which were tested with analog signals. This accelerator has the advantages of good repeatability, high resolution and excellent stability. Relationship between linear acceleration and resonant frequency of the sensing unit was deduced and the ...
Jing Li, Shang Chun Fan, Zhan She Guo
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Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies.
Miani, Theo +8 more
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Design and optimization of a novel resonant accelerometer resonator
SPIE Proceedings, 2006MEMS resonant accelerometer has been proved to be a delicate accelerometer with high performance. Mechanical resonator is the core component for the design of MEMS resonant accelerometer. With the development of surface micro-machining and bulk micro-machining technology, the silicon resonator has expanded its use to micro-accelerometers.
Shangchun Fan, Zhiping Peng
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A photonic integrated resonant accelerometer
2016 IEEE Photonics Conference (IPC), 2016We demonstrate a novel photonic integrated accelerometer having 6 μg/√Hz sensitivity. The device was realized by integrating millimeter-scale mechanical structures with sub-micron silicon photonics using a 200-mm silicon toolset. We review our initial results and discuss the potential realization of nano-g level performance in a chip-scale device.
Suraj Bramhavar +2 more
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