Results 171 to 180 of about 261,095 (203)
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A photonic integrated resonant accelerometer
2016 IEEE Photonics Conference (IPC), 2016We demonstrate a novel photonic integrated accelerometer having 6 μg/√Hz sensitivity. The device was realized by integrating millimeter-scale mechanical structures with sub-micron silicon photonics using a 200-mm silicon toolset. We review our initial results and discuss the potential realization of nano-g level performance in a chip-scale device.
Suraj Bramhavar +2 more
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Resonant accelerometer with self-test
Sensors and Actuators A: Physical, 2001A new resonant accelerometer is presented consisting of a doubly clamped beam coupled to a seismic mass. The beam is thermally excited by an implanted resistor and its vibration is sensed piezoresistively. An acceleration which deflects the seismic mass leads to characteristic strains inside the resonator, shifting its resonance frequency.
M. Aikele +6 more
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Design and Analysis of Resonator for the Resonant Accelerometer
2017This paper investigates the design and analysis of resonator for the resonant accelerometer. The difference in the resonator resonant frequency in driving and sensing mode and the resonator sensitivity were found to be key factors in determining the performance of the resonant accelerometer.
Yan Li, Xi Chen, Yunjiu Zhang
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Accelerometer by means of a resonant microactuator
SPIE Proceedings, 2004A monolithic resonant micro actuator was developed, fabricated by CMOS-compatible micro machining technology, tested and evaluated. The component is able to measure acceleration in at least two directions. The device made of single-crystal silicon oscillates perpendicularly to the surface plane at a constant frequency in the 8 kHz range. A square-pulse
Christian Drabe +4 more
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Design and simulations of a resonant accelerometer
Microsystem Technologies, 2017A resonant accelerometer was designed and simulated in detail. The structure was composed of external frame and internal structure. The internal structure consists of a single proof mass, a pair of resonators and elastic beams. Structure design is implemented by taking advantage of the finite element analyses.
Yan Li +3 more
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Energy method for the optimization of a silicon resonant accelerometer
2016 IEEE International Instrumentation and Measurement Technology Conference Proceedings, 2016This study investigated the application of energy-consume concept on a silicon resonant accelerometer (SRA) to address design issues. Constrained by micro-fabrication technology, structure of the SRA is formed by resonators, micro-lever mechanisms, proof mass and multi flexures. They are referred to as compliant mechanisms.
Jing Zhang +3 more
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An integrated packaged resonant accelerometer with temperature compensation
Review of Scientific Instruments, 2020This paper describes the design, fabrication, and testing of an integrated packaged sensor that is composed of a micro resonant accelerometer and a temperature sensor. The resonant accelerometer with differential configuration consists of double quartz resonators and a silicon substrate. When acceleration is applied along the sensing axis, the inertial
Bo Li +4 more
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Double resonator cantilever accelerometer
The Journal of the Acoustical Society of America, 1985A digital quartz accelerometer includes a pair of spaced double-ended tuning forks fastened at one end to a base and at the other end through a spacer mass. Transverse movement of the resonator members stresses one and compresses the other, providing a differential frequency output which is indicative of acceleration.
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Micro-machined resonant accelerometer with high sensitivity
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011A resonant accelerometer with high sensitivity, fabricated through MEMS bulk-silicon processes, is proposed in this paper. The external acceleration can be transferred into the frequency shift of the resonant beams which is double-clamped by the proof mass and the anchor.
Junbo Wang 0002 +4 more
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Minimisation of resonance phenomena effect of piezoresistive accelerometer
2015 4th International Conference on Systems and Control (ICSC), 2015In this paper, a suitable mathematical model of piezoresistive accelerometer is developed and validated by simulation tests. A new relationship is found between the movement relative frequency and piezoresistive accelerometer natural frequency.
Zine Ghemari +2 more
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