Results 161 to 170 of about 261,095 (203)
A new biaxial silicon resonant micro accelerometer
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011 A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass.
COMI, CLAUDIA +5 more
openaire +2 more sources
Some of the next articles are maybe not open access.
Related searches:
Related searches:
Design for the external frame of a resonant accelerometer sensor
International Journal of Embedded Systems, 2020Jing Li +5 more
exaly +3 more sources
A micromachined resonant accelerometer
SPIE Proceedings, 2006Micromechanical resonant sensors are very attractive for high-precision measurement applications due to their high sensitivity, direct frequency output and large dynamic range. This paper presents a high accuracy micromechanical resonant accelerometer on basis of detailed investigation.
Jie Ren +3 more
openaire +1 more source
Microwave resonator accelerometer
The Journal of the Acoustical Society of America, 1995A microwave resonator accelerometer including a microwave resonant cavity having a predetermined resonant frequency; the cavity including a flexible portion; a proof mass fixed to the flexible portion for changing the geometry and establishing a new resonant frequency of the cavity in response to an acceleration force on the proof mass; a microwave ...
Anthony Petrovich, Marc Weinberg
openaire +1 more source
Design of a Resonant Accelerometer
Advanced Materials Research, 2012A resonant accelerometer was designed in order to overcome low output precision characteristics of the sensors which were tested with analog signals. This accelerator has the advantages of good repeatability, high resolution and excellent stability. Relationship between linear acceleration and resonant frequency of the sensing unit was deduced and the ...
Jing Li, Shang Chun Fan, Zhan She Guo
openaire +1 more source
Design and optimization of a novel resonant accelerometer resonator
SPIE Proceedings, 2006MEMS resonant accelerometer has been proved to be a delicate accelerometer with high performance. Mechanical resonator is the core component for the design of MEMS resonant accelerometer. With the development of surface micro-machining and bulk micro-machining technology, the silicon resonator has expanded its use to micro-accelerometers.
Shangchun Fan, Zhiping Peng
openaire +1 more source
Proof of Concept of a Graphene-Based Resonant Accelerometer
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021Acceleration measurements are fundamental in applications such as consumer electronics, navigation, automotive safety and Internet of things (IoT). In comparison with capacitive or piezoresistive MEMS accelerometers, resonant graphene accelerometers have the potential to be smaller.
Moreno, Daniel +3 more
openaire +2 more sources
Accelerometer Transverse Resonance Effects
SAE Technical Paper Series, 1989<div class="htmlview paragraph">This article describes experimentation showing that accelerometers can exhibit resonant frequencies in transverse axes which are lower in frequency than the resonances in the sensitive axis. These lower frequency transverse resonances can produce transverse sensitivities considerably higher than those the ...
Robert L. Kinzel, W. Tustin
openaire +1 more source
Enhancing the Sensitivity of a Resonant Accelerometer
Volume 11: Mechanical Systems and Control, 2008This paper presents an investigation on the sensitivity enhancement of a resonant accelerometer by operating it in the nonlinear regime. The accelerometer is excited by a DC load superimposed to an AC harmonic load. The electric load is tuned such that the accelerometer is driven at primary resonance with a softening-type behavior. Upon the application
Mahmoud I. Ibrahim, Mohammad I. Younis
openaire +1 more source
Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies.
Miani, Theo +8 more
openaire +2 more sources