Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer [PDF]
Sensors, 2020 This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Yan Li +4 more
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Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer [PDF]
Micromachines, 2022 There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
doaj +6 more sources
Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer [PDF]
Micromachines, 2023 An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design,
Xiaowei Guo +6 more
doaj +4 more sources
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Micromachines, 2019 In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Jian Yang +8 more
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Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms [PDF]
MicromachinesThis article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms.
Jiaqi Miao +7 more
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Programmable synchronization enhanced MEMS resonant accelerometer. [PDF]
Microsyst Nanoeng, 2020 AbstractAcceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms.
Xu L, Wang S, Jiang Z, Wei X.
europepmc +4 more sources
Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators. [PDF]
Sensors (Basel)High-frequency sensitivity to external acceleration is crucial for improving the accuracy of MEMS resonant accelerometers. This study proposes utilizing shape optimization of microlevers and resonators to improve sensitivity. Initially, an optimization model for microlevers is established, considering the arm’s shape and the dimensions of the pivots ...
Ran L, Zhao W, Li T, He J, Zhou W.
europepmc +3 more sources
Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect [PDF]
MicromachinesIn this work, a novel approach for implementing a resonant micro-accelerometer is demonstrated that may extend the operating frequency of such devices to several tens of MHz, which may enable direct wireless signal transfer.
Ankesh Todi +2 more
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A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure [PDF]
MicromachinesThis study presents a high-performance MEMS accelerometer employing a symmetrical differential ‘sandwich’ capacitive structure. An orthogonal rectangular compensation method was integrated with wet anisotropic etching to achieve high structural symmetry.
Zihan Wang +6 more
doaj +2 more sources
Device-Level Modeling, Cross-Axis Analysis, and Optical Characterization of a Symmetric Triple-Layer MOEMS Accelerometer [PDF]
MicromachinesEnhancing the proof mass without enlarging the chip area or introducing structural asymmetry is a central challenge in the development of low-noise microelectromechanical system (MEMS) accelerometers.
Pengfei Li +8 more
doaj +2 more sources