Results 1 to 10 of about 78 (75)

Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

Sensors, 2020
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Fuling Yang
exaly   +3 more sources

A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

Micromachines, 2019
In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Meng Zhang, Meng Zhang, Ning Jin
exaly   +3 more sources

Resonant MEMS Accelerometer With Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms

Micromachines
This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms.
Jiaqi Miao, Pinghua Li, Mingchen Lv, Suzhen Nie, Yang Liu, Ruimei Liang, Weijiang Ma, Xuye Zhuang   +7 more
exaly   +3 more sources

Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer

Micromachines, 2023
Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application.
Xiaorui Bie, Xingyin Xiong, Zheng Wang, Wuhao Yang, Zhitian Li, Xudong Zou   +5 more
doaj   +1 more source

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Micromachines, 2023
In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being ...
Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang, Zhanying Wang   +7 more
doaj   +1 more source

A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits

Frontiers in Mechanical Engineering, 2022
MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj   +1 more source

Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer

Micromachines, 2022
There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
doaj   +1 more source

Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer

Micromachines, 2023
An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design,
Xiaowei Guo, Wuhao Yang, Tianyi Zheng, Jie Sun, Xingyin Xiong, Zheng Wang, Xudong Zou   +6 more
doaj   +1 more source

Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

Micromachines, 2021
A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide ...
Chih-Hsuan Lin, Chao-Hung Song, Kuei-Ann Wen   +2 more
doaj   +1 more source

A High-Sensitivity MEMS Accelerometer Using a Sc_0.8Al_0.2N-Based Four Beam Structure

Micromachines, 2023
In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four
Zhenghu Zhang, Linwei Zhang, Zhipeng Wu, Yunfei Gao, Liang Lou   +4 more
doaj   +1 more source