Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer [PDF]
Sensors, 2020 This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Fuling Yang
exaly +8 more sources
Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer [PDF]
Micromachines, 2022 There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
doaj +5 more sources
Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms [PDF]
MicromachinesThis article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms.
Pinghua Li
exaly +5 more sources
Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer [PDF]
Micromachines, 2023 An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design,
Xiaowei Guo +6 more
doaj +3 more sources
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Micromachines, 2019 In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Jian Yang, Meng Zhang, Yan Su
exaly +4 more sources
Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect [PDF]
MicromachinesIn this work, a novel approach for implementing a resonant micro-accelerometer is demonstrated that may extend the operating frequency of such devices to several tens of MHz, which may enable direct wireless signal transfer.
Ankesh Todi +2 more
doaj +2 more sources
Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm [PDF]
MicromachinesThis article describes a global structure optimization methodology for microelectromechanical system devices based on a multi-objective elitist genetic algorithm.
Dongda Yang +10 more
doaj +2 more sources
A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit [PDF]
Microsystems & NanoengineeringA differential microelectromechanical system (MEMS) quartz resonant accelerometer with a novel oscillating readout circuit is proposed. The phase noise in a piezoelectric quartz resonant accelerometer has been systematically investigated.
Kai Bu +4 more
doaj +2 more sources
A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure [PDF]
MicromachinesThis study presents a high-performance MEMS accelerometer employing a symmetrical differential ‘sandwich’ capacitive structure. An orthogonal rectangular compensation method was integrated with wet anisotropic etching to achieve high structural symmetry.
Zihan Wang +6 more
doaj +2 more sources
Fiber-optic Fabry–Pérot interferometric accelerometer with composite cavity and temperature calibration for high-temperature and high-pressure applications [PDF]
Microsystems & NanoengineeringTo address the demand for flow-induced vibration monitoring of steam generator heat transfer tubes in pressurized water reactors under high-temperature (350 °C) and high-pressure (17.5 MPa) conditions, a fiber-optic Fabry–Pérot interferometric ...
Feng Qin +6 more
doaj +2 more sources