Results 31 to 40 of about 865 (177)

A High-Sensitivity MEMS Accelerometer Using a Sc_0.8Al_0.2N-Based Four Beam Structure

Micromachines, 2023
In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four
Zhenghu Zhang, Linwei Zhang, Zhipeng Wu, Yunfei Gao, Liang Lou   +4 more
doaj   +1 more source

Proof of Concept of a Graphene-Based Resonant Accelerometer

, 2021
Acceleration measurements are fundamental in applications such as consumer electronics, navigation, automotive safety and Internet of things (IoT). In comparison with capacitive or piezoresistive MEMS accelerometers, resonant graphene accelerometers have
Niklaus, Frank,, Moreno, Daniel,, Daniel Moreno, Frank Niklaus, Luis Guillermo Villanueva, Fan, Xuge,, Villanueva, Luis Guillermo,, Xuge Fan   +7 more
core   +2 more sources

Suitability of MEMS accelerometers for condition monitoring: An experimental study [PDF]

, 2008
With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen.
Samir Mekid, Pietruszkiewicz, R, Mekid, S., Andrew Starr, Starr, Andrew G., Alhussein Albarbar, Albarbar, A., Robert Pietruszkiewicz   +7 more
core   +1 more source

A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity [PDF]

, 2015
This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with ...
Chun Zhao, Zhao, C, Honglong Chang, Xie, Jianbing, Xie, J, Chang, H, Pu, SH, Kraft, M, Kraft, Michael, Chang, Honglong, Pu, Suan-Hui, Michael Kraft, ,, Graham S. Wood, Suan Hui Pu, Zhao, Chun, Wood, GS, Jianbing Xie, Wood, Graham S., Chong, HMH, Chong, Harold M.H., Harold M. H. Chong   +21 more
core   +1 more source

A Fiber Bragg Grating Sensing-Based Micro-Vibration Sensor and Its Application

Sensors, 2016
This paper proposes a fiber Bragg grating sensing-based micro-vibration sensor. The optical fiber has been directly treated as an elastomer to design the micro-vibration sensor, which possesses two FBGs.
Tianliang Li, Yuegang Tan, Zude Zhou
doaj   +1 more source

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

Micromachines, 2020
High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper
Bo Jiang, Shenhu Huang, Jing Zhang, Yan Su   +3 more
doaj   +1 more source

Research status and development trend of silicon resonant MEMS accelerometer

Gongneng cailiao yu qijian xuebao
The silicon resonant MEMS (Micro-Electro-Mechanical System) accelerometer offers several advantages, including small size, high precision, low power consumption, and strong anti-interference capabilities, making it a highly promising high-precision MEMS ...
Jin-tao WANG, Fei LIU, Hui-tong CAO, Chen-zheng LI, Yan-chao SHEN, Yong-sheng WANG, Tian-ling REN   +6 more
doaj   +1 more source

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

Micromachines, 2019
This paper first presents an adaptive expectation-maximization (AEM) control algorithm based on a measurement-data-driven model to reduce the variance of microelectromechanical system (MEMS) accelerometer sensor under multi disturbances.
Qiang Shen, Dengfeng Yang, Jie Zhou, Yixuan Wu, Yinan Zhang, Weizheng Yuan   +5 more
doaj   +1 more source

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

Micromachines, 2016
This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching.
Zhu Li, Wen Jie Wu, Pan Pan Zheng, Jin Quan Liu, Ji Fan, Liang Cheng Tu   +5 more
doaj   +1 more source

Transducers Across Scales and Frequencies: A System‐Level Framework for Multiphysics Integration and Co‐Design

Advanced Materials Technologies, EarlyView.
Transducers convert physical signals into electrical and optical representations, yet each mechanism is bounded by intrinsic trade‐offs across bandwidth, sensitivity, speed, and energy. This review maps transduction mechanisms across physical scale and frequency, showing how heterogeneous integration and multiphysics co‐design transform isolated ...
Aolei Xu, Mengyao Xiao, Zhouli Sui, Yinpeng Wang, Daoye Zheng, Yuxin Liu, Luwei Wang, Huajun Liu, Chengkuo Lee   +8 more
wiley   +1 more source