Results 31 to 40 of about 334,732 (168)

Development Of Tilt And Vibration Measurement And Detection System Using MEMS Accelerometer As A Sensor [TK7875. K45 2008 f rb]. [PDF]

, 2008
Dalam projek ini, sistem pengukuran dan pengesan isyarat sudut miring dan isyarat getaran menggunakan meter pecutan MEMS yang mempunyai dua paksi deria X dan Y dibina dengan jayanya. In this project, a measurement and detection system to detect tilt
Abd Wahid, Khairul Anuar
core   +1 more source

Enhancements of MEMS design flow for Automotive and Optoelectronic applications [PDF]

, 2010
In the latest years we have been witnesses of a very rapidly and amazing grown of MicroElectroMechanical systems (MEMS) which nowadays represent the outstanding state-of-the art in a wide variety of applications from automotive to commercial, biomedical ...
MARCHETTI, ELEONORA
core   +1 more source

A Fiber Bragg Grating Sensing-Based Micro-Vibration Sensor and Its Application

Sensors, 2016
This paper proposes a fiber Bragg grating sensing-based micro-vibration sensor. The optical fiber has been directly treated as an elastomer to design the micro-vibration sensor, which possesses two FBGs.
Tianliang Li, Yuegang Tan, Zude Zhou
doaj   +1 more source

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

Micromachines, 2020
High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper
Bo Jiang, Shenhu Huang, Jing Zhang, Yan Su   +3 more
doaj   +1 more source

Research status and development trend of silicon resonant MEMS accelerometer

Gongneng cailiao yu qijian xuebao
The silicon resonant MEMS (Micro-Electro-Mechanical System) accelerometer offers several advantages, including small size, high precision, low power consumption, and strong anti-interference capabilities, making it a highly promising high-precision MEMS ...
Jin-tao WANG, Fei LIU, Hui-tong CAO, Chen-zheng LI, Yan-chao SHEN, Yong-sheng WANG, Tian-ling REN   +6 more
doaj   +1 more source

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

Micromachines, 2019
This paper first presents an adaptive expectation-maximization (AEM) control algorithm based on a measurement-data-driven model to reduce the variance of microelectromechanical system (MEMS) accelerometer sensor under multi disturbances.
Qiang Shen, Dengfeng Yang, Jie Zhou, Yixuan Wu, Yinan Zhang, Weizheng Yuan   +5 more
doaj   +1 more source

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

Micromachines, 2016
This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching.
Zhu Li, Wen Jie Wu, Pan Pan Zheng, Jin Quan Liu, Ji Fan, Liang Cheng Tu   +5 more
doaj   +1 more source

Pulsed Digital Oscillators for Electrostatic MEMS [PDF]

, 2012
This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically sampled. Short pulses of zero
Pons Nin, Joan, Blokhina, Elena, Madrenas, J., Gorreta, Sergi, Gorreta Mariné, Sergio, Domínguez Pumar, Manuel, O'Connell, Diarmuid, Feely, Orla, Dominguez, Manuel, Jiménez Serres, Vicente, Ruiz Fernández, Daniel, Madrenas Boadas, Jordi, Fernandez, D., O\u27Connell, Diarmuid, O'Connell, D., Jimenez, V.   +15 more
core   +1 more source

An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer

Sensors, 2009
A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented.
doaj   +1 more source

Theoretical and numerical study of a novel mode-localized accelerometer using coupling-stiffness perturbation [PDF]

AIP Advances
Conventional Micro-Electro-Mechanical Systems (MEMS) mode-localized sensors based on mass or stiffness perturbation are constrained by a fundamental sensitivity limit due to mode aliasing.
Bin Wu, Minda Dai, Mingteng Chen, Xin Guo   +3 more
doaj   +1 more source