Design and Implementation of a Micromechanical Silicon Resonant Accelerometer [PDF]
Sensors, 2013 The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang, Jinxing Liang, Yang Gao
exaly +9 more sources
A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams [PDF]
Sensors, 2022 In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and ...
Yang Xiao +4 more
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Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis [PDF]
Micromachines, 2021 This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts ...
Yan Li +3 more
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Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer [PDF]
Sensors, 2020 This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Yan Li +4 more
doaj +3 more sources
Structural Design and Testing of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage.
Heng Liu, Yu Zhang, Jiale Wu
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Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer [PDF]
Micromachines, 2022 There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
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Fast frequency relocking for synchronization enhanced resonant accelerometer [PDF]
Microsystems & Nanoengineering, 2022 Synchronization, as a unique phenomenon, has been extensively studied in biology, chaotic systems, nonlinear dynamics, quantum information, and other fields. Benefiting from the characteristics of frequency amplification, noise suppression, and stability
Liu Xu +3 more
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Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer [PDF]
Micromachines, 2023 Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application.
Xiaorui Bie +5 more
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An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers
Micromachines, 2021 Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience.
Xudong Zou, Xingyin Xiong, Kunfeng Wang
exaly +3 more sources
Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer [PDF]
Micromachines, 2023 An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design,
Xiaowei Guo +6 more
doaj +2 more sources