A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit [PDF]
Microsystems & NanoengineeringA differential microelectromechanical system (MEMS) quartz resonant accelerometer with a novel oscillating readout circuit is proposed. The phase noise in a piezoelectric quartz resonant accelerometer has been systematically investigated.
Kai Bu +4 more
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Integrated structure for a resonant micro-gyroscope and accelerometer [PDF]
Fracture and Structural Integrity, 2014 This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases ...
V. Zega +3 more
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A kind of stability analysis method for the resonant accelerometer
矿业科学学报, 2020 The vibration stability is one of the important performances of resonant accelerometer, which has an important impact on measurement accuracy and reliability.In this paper, the sensitive structure vibration stability of the resonant accelerometer is ...
Li Yan +5 more
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Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect [PDF]
Sensors, 2017 Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE).
Aoqun Jian +7 more
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Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications [PDF]
Micromachines, 2019 With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes.
Yu-Hsuan Chen +4 more
doaj +2 more sources
A zinc oxide resonant nano-accelerometer with ultra-high sensitivity [PDF]
Nature CommunicationsNanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption.
Pengfei Xu +11 more
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Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect [PDF]
MicromachinesIn this work, a novel approach for implementing a resonant micro-accelerometer is demonstrated that may extend the operating frequency of such devices to several tens of MHz, which may enable direct wireless signal transfer.
Ankesh Todi +2 more
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Mitigation of Mechanical Crosstalk in Resonant Beam Accelerometers
IEEE Sensors JournalResonant MEMS beam accelerometers have demonstrated remarkable sensitivity and stability, enabling applications in seismology and gravimetry while keeping a small footprint. However, mechanical cross-talk and resonance mode coupling have shown to be specially detrimental to the operation of this kind of accelerometers, especially when employing nano ...
Théo Miani +8 more
openalex +4 more sources
Micromachines, 2021 This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one ...
Libin Huang +5 more
doaj +1 more source
Micromachines, 2021 This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer.
Libin Huang +5 more
doaj +1 more source