Results 1 to 10 of about 2,241 (208)

Development of a novel GaAs micromachined accelerometer based on resonant tunneling diodes

Sensors and Actuators A: Physical, 2008
Wendong Zhang, Chenyang Xue, Jijun Xiong   +2 more
exaly  

Electrostatic Resonant Accelerometer with Force-Rebalance Control

2024 IEEE SENSORS
Yoshiyuki Hata, Daiki Kondo, Haruki Kawano, Yugo Takeda   +3 more
openaire   +1 more source

A novel design of a MEMS resonant accelerometer with adjustable sensitivity

Sensors and Actuators A: Physical
Yonghong Qi, Minghui Zhao, Xueyong Wei   +2 more
exaly  

A Review on MEMS Silicon Resonant Accelerometers

Journal of Microelectromechanical Systems
Zhao Zhang, Hemin Zhang, Yongcun Hao, Honglong Chang   +3 more
openaire   +1 more source

Design and Sensitivity Analysis of a Micro-Resonant Accelerometer With Adjustable Stiffness

IEEE Sensors Journal
Xiangyu Tian, Wen-Ming Zhang
exaly  

Design and Implementation of a Micromechanical Silicon Resonant Accelerometer [PDF]

Sensors, 2013
The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang, Yang Gao, Liye Zhao
exaly   +8 more sources

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis [PDF]

Micromachines, 2021
This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts ...
Fuling Yang
exaly   +8 more sources

An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer [PDF]

Sensors, 2009
A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented.
Deyong Chen, Junbo Wang, Chen Deyong
exaly   +8 more sources

Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity [PDF]

Sensors, 2015
This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork ...
Jing Zhang, Yan Su, Qin Shi
exaly   +8 more sources

Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer [PDF]

Sensors, 2020
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Fuling Yang
exaly   +5 more sources