Design and Implementation of a Micromechanical Silicon Resonant Accelerometer [PDF]
Sensors, 2013 The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang +4 more
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An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer [PDF]
Sensors, 2009 A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented.
Deyong Chen
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Structural Design and Testing of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage.
Heng Liu, Yu Zhang, Jiale Wu
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Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer [PDF]
Sensors, 2020 This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Yan Li +4 more
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Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis [PDF]
Micromachines, 2021 This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts ...
Yan Li +3 more
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Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity [PDF]
Sensors, 2015 This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork ...
Jing Zhang, Yan Su, Qin Shi, An-Ping Qiu
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A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams [PDF]
Sensors, 2022 In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and ...
Yang Xiao +4 more
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Fast frequency relocking for synchronization enhanced resonant accelerometer [PDF]
Microsystems & Nanoengineering, 2022 Synchronization, as a unique phenomenon, has been extensively studied in biology, chaotic systems, nonlinear dynamics, quantum information, and other fields. Benefiting from the characteristics of frequency amplification, noise suppression, and stability
Liu Xu +3 more
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Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer [PDF]
Micromachines, 2022 There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
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Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer [PDF]
Micromachines, 2023 Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application.
Xiaorui Bie +5 more
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