A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness
Sensors, 2015 Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer
Bo Yang +3 more
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Programmable synchronization enhanced MEMS resonant accelerometer. [PDF]
Microsyst Nanoeng, 2020 AbstractAcceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms.
Xu L, Wang S, Jiang Z, Wei X.
europepmc +4 more sources
Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer [PDF]
Micromachines, 2023 An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design,
Xiaowei Guo +6 more
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Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained.
Heng Liu, Yu Zhang, Jiale Wu
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Micromachines, 2021 This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one ...
Libin Huang +5 more
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A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit [PDF]
Microsystems & NanoengineeringA differential microelectromechanical system (MEMS) quartz resonant accelerometer with a novel oscillating readout circuit is proposed. The phase noise in a piezoelectric quartz resonant accelerometer has been systematically investigated.
Kai Bu +4 more
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Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications [PDF]
Micromachines, 2019 With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes.
Yu-Hsuan Chen +4 more
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A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift [PDF]
Sensors, 2017 Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate.
Bo Li +5 more
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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Micromachines, 2019 In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Jian Yang +8 more
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Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect [PDF]
MicromachinesIn this work, a novel approach for implementing a resonant micro-accelerometer is demonstrated that may extend the operating frequency of such devices to several tens of MHz, which may enable direct wireless signal transfer.
Ankesh Todi +2 more
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