A New Z-Axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness
Sensors, 2015 Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer
Bo Yang, Xingjun Wang
exaly +4 more sources
Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity [PDF]
Sensors, 2015 This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork ...
Jing Zhang, Yan Su, Qin Shi, An-Ping Qiu
doaj +6 more sources
An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer [PDF]
Sensors, 2009 A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented.
Chen, Deyong +4 more
doaj +5 more sources
Micromachines, 2021 This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one ...
Libin Huang +5 more
doaj +2 more sources
Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained.
Heng Liu, Yu Zhang, Jiale Wu
doaj +2 more sources
A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit [PDF]
Microsystems & NanoengineeringA differential microelectromechanical system (MEMS) quartz resonant accelerometer with a novel oscillating readout circuit is proposed. The phase noise in a piezoelectric quartz resonant accelerometer has been systematically investigated.
Kai Bu +4 more
doaj +2 more sources
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Micromachines, 2019 In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Jian Yang +8 more
doaj +2 more sources
Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications [PDF]
Micromachines, 2019 With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes.
Yu-Hsuan Chen +4 more
doaj +2 more sources
Sensors, 2018 A novel, ultrahigh-sensitivity wide-range resonant micro-accelerometer using two differential double-clamped monolayer graphene beams is designed and investigated by steady-state simulation via COMSOL Multiphysics software in this paper.
Fu-Tao Shi +3 more
doaj +2 more sources
A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift [PDF]
Sensors, 2017 Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate.
Bo Li +5 more
doaj +2 more sources