Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity [PDF]
Sensors, 2015 This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork ...
Jing Zhang, Yan Su, Qin Shi, An-Ping Qiu
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Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis [PDF]
Micromachines, 2021 This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts ...
Yan Li +3 more
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Structural Design and Testing of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage.
Heng Liu, Yu Zhang, Jiale Wu
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Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer [PDF]
Micromachines, 2023 Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application.
Xiaorui Bie +5 more
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A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams [PDF]
Sensors, 2022 In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and ...
Yang Xiao +4 more
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Programmable synchronization enhanced MEMS resonant accelerometer. [PDF]
Microsyst Nanoeng, 2020 AbstractAcceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms.
Xu L, Wang S, Jiang Z, Wei X.
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Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer [PDF]
Sensors, 2020 This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers.
Yan Li +4 more
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A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness [PDF]
Sensors, 2015 Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer
Bo Yang +3 more
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Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer [PDF]
Micromachines, 2023 An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design,
Xiaowei Guo +6 more
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Design and Implementation of a Micromechanical Silicon Resonant Accelerometer [PDF]
Sensors, 2013 The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang +4 more
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