Results 31 to 40 of about 2,241 (208)

Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators. [PDF]

Sensors (Basel)
High-frequency sensitivity to external acceleration is crucial for improving the accuracy of MEMS resonant accelerometers. This study proposes utilizing shape optimization of microlevers and resonators to improve sensitivity. Initially, an optimization model for microlevers is established, considering the arm’s shape and the dimensions of the pivots ...
Ran L, Zhao W, Li T, He J, Zhou W.
europepmc   +3 more sources

Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms

Micromachines
This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms.
Jiaqi Miao, Pinghua Li, Mingchen Lv, Suzhen Nie, Yang Liu, Ruimei Liang, Weijiang Ma, Xuye Zhuang   +7 more
doaj   +2 more sources

A Small and High Sensitivity Resonant Accelerometer

Procedia Chemistry, 2009
AbstractThis abstract presents the design, the fabrication and the measurements of a very small and sensitive resonantaccelerometer. The sensor is based on a strain sensitive vibrating beam attached to a mass. The vibration of thebeam is electrostatically driven and the detection of the signal is capacitive.The sensor is fabricated thanks to potential ”
Pinto, D., Mercier, D., Kharrat, C., Colinet, E., Nguyen, V., Reig, B., Hentz, S.   +6 more
openaire   +2 more sources

A kind of stability analysis method for the resonant accelerometer

矿业科学学报, 2020
The vibration stability is one of the important performances of resonant accelerometer, which has an important impact on measurement accuracy and reliability.In this paper, the sensitive structure vibration stability of the resonant accelerometer is ...
Li Yan, Zeng Haoxuan, Zhang Shuaiyin, Zhu Zhouyu, Zhou Xun, Zhou Ziqiang   +5 more
doaj   +1 more source

Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control

Micromachines, 2021
This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer.
Libin Huang, Kai Jiang, Peng Wang, Meimei Zhang, Xukai Ding, Hongsheng Li   +5 more
doaj   +1 more source

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

Micromachines, 2021
Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience.
Pengcheng Cai, Xingyin Xiong, Kunfeng Wang, Jiawei Wang, Xudong Zou   +4 more
doaj   +1 more source

A Theoretical and Empirical Investigation of Design Characteristics in a Pb(Zr,Ti)O₃-Based Piezoelectric Accelerometer

Sensors, 2020
A theoretical and experimental study on the design-to-performance characteristics of a compression-mode Pb(Zr,Ti)O3-based piezoelectric accelerometer is presented.
Min-Ku Lee, Seung-Ho Han, Jin-Ju Park, Gyoung-Ja Lee   +3 more
doaj   +1 more source

Integrated structure for a resonant micro-gyroscope and accelerometer [PDF]

Fracture and Structural Integrity, 2014
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases ...
V. Zega, C. Comi, A. Corigliano, C. Valzasina   +3 more
doaj   +3 more sources

Ultraminiature resonator accelerometer [PDF]

, 1996
A new family of microminiature sensors and clocks is being developed with widespread application potential for missile and weapons applications, as biomedical sensors, as vehicle status monitors, and as high-volume animal identification and health sensors.
Koehler, D. R., Kravitz, S. H., Vianco, P. T.   +2 more
openaire   +2 more sources

Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw

Micromachines, 2022
A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure that
Dunzhu Xia, Mohan Yao, Jinhui Li
doaj   +1 more source