A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Micromachines, 2019 In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the ...
Jian Yang +8 more
doaj +3 more sources
An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers
Micromachines, 2021 Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience.
Pengcheng Cai +4 more
doaj +1 more source
Temperature drift suppression and measurement dead zone elimination in differential MEMS resonant accelerometers using dual-mode operating method. [PDF]
Microsyst NanoengZhu B +7 more
europepmc +3 more sources
Sensors, 2020 A theoretical and experimental study on the design-to-performance characteristics of a compression-mode Pb(Zr,Ti)O3-based piezoelectric accelerometer is presented.
Min-Ku Lee +3 more
doaj +1 more source
Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators. [PDF]
Sensors (Basel)Ran L, Zhao W, Li T, He J, Zhou W.
europepmc +2 more sources
Ultraminiature resonator accelerometer [PDF]
, 1996 A new family of microminiature sensors and clocks is being developed with widespread application potential for missile and weapons applications, as biomedical sensors, as vehicle status monitors, and as high-volume animal identification and health sensors.
Koehler, D. R. +2 more
openaire +2 more sources
Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw
Micromachines, 2022 A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure that
Dunzhu Xia, Mohan Yao, Jinhui Li
doaj +1 more source
Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers [PDF]
, 2006 A new microfabrication technology for high-aspect-ratio parylene structure has been developed for soft spring applications. Free-standing parylene beams with widths of 10–40 µm and aspect ratios of 10–20 have been successfully fabricated.
Suzuki, Yuji, Tai, Yu-Chong
core +1 more source
Feasibility of using low‐sampled accelerometer measurements for bolt joint looseness detection
IET Renewable Power Generation, 2022 In this work, the feasibility of using low‐sampled vibration signals for bolt joint tightness detection was investigated. Testing was carried out on multiple bolt joint configurations using a bench top electrodynamic shaker rig.
Gary Nicholas +4 more
doaj +1 more source
Personal HealthCare of Things: A novel paradigm and futuristic approach
CAAI Transactions on Intelligence Technology, EarlyView., 2023 Abstract This study provides an investigative approach and offers a complete review of research on Internet of Medical Things (IoMT), describing the progress in general and highlighting the research issues, trends, and future aspects of IoMT. Exploring a research strategy for IoMT systems is vital as the need for IoT in healthcare grows. By aggregating
Surbhi Gupta +5 more
wiley +1 more source