Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained.
Heng Liu, Yu Zhang, Jiale Wu
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A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit [PDF]
Microsystems & NanoengineeringA differential microelectromechanical system (MEMS) quartz resonant accelerometer with a novel oscillating readout circuit is proposed. The phase noise in a piezoelectric quartz resonant accelerometer has been systematically investigated.
Kai Bu +4 more
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Surface-micromachined resonant accelerometer [PDF]
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002 This paper discusses the design and testing of a resonant accelerometer developed for integrated surface-micromachining processes. First- and second-generation designs are presented. The sensors use leverage mechanisms to transfer force from a proof mass to double-ended tuning fork (DETF) resonators used as force transducers.
Roessig, T. A. +3 more
openaire +2 more sources
Sensors, 2018 A novel, ultrahigh-sensitivity wide-range resonant micro-accelerometer using two differential double-clamped monolayer graphene beams is designed and investigated by steady-state simulation via COMSOL Multiphysics software in this paper.
Fu-Tao Shi +3 more
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Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications [PDF]
Micromachines, 2019 With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes.
Yu-Hsuan Chen +4 more
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A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift [PDF]
Sensors, 2017 Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate.
Bo Li +5 more
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A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor [PDF]
Micromachines, 2019 Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability.
Jian Cui +4 more
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Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect [PDF]
MicromachinesIn this work, a novel approach for implementing a resonant micro-accelerometer is demonstrated that may extend the operating frequency of such devices to several tens of MHz, which may enable direct wireless signal transfer.
Ankesh Todi +2 more
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Sensors, 2016 For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper.
Yu Xu, Libo Zhao, Niancai Peng
exaly +3 more sources
Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect
Sensors, 2017 Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE).
Aoqun Jian +7 more
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