Fast frequency relocking for synchronization enhanced resonant accelerometer [PDF]
Microsystems & Nanoengineering, 2022 Synchronization, as a unique phenomenon, has been extensively studied in biology, chaotic systems, nonlinear dynamics, quantum information, and other fields. Benefiting from the characteristics of frequency amplification, noise suppression, and stability
Liu Xu +3 more
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Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms [PDF]
MicromachinesThis article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms.
Jiaqi Miao +7 more
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A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor [PDF]
Micromachines, 2019 Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability.
Jian Cui +4 more
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An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer [PDF]
Sensors, 2009 A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented.
Chen D, Wu Z, Liu L, Shi X, Wang J.
doaj +5 more sources
Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers [PDF]
Sensors, 2019 Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress.
Yonggang Yin +3 more
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A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift [PDF]
Sensors, 2017 Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate.
Bo Li +5 more
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Surface-micromachined resonant accelerometer [PDF]
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002 This paper discusses the design and testing of a resonant accelerometer developed for integrated surface-micromachining processes. First- and second-generation designs are presented. The sensors use leverage mechanisms to transfer force from a proof mass to double-ended tuning fork (DETF) resonators used as force transducers.
T.A. Roessig +3 more
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Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer [PDF]
Micromachines, 2022 There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
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Modeling and Analysis of a Novel Ultrasensitive Differential Resonant Graphene Micro-Accelerometer with Wide Measurement Range [PDF]
Sensors, 2018 A novel, ultrahigh-sensitivity wide-range resonant micro-accelerometer using two differential double-clamped monolayer graphene beams is designed and investigated by steady-state simulation via COMSOL Multiphysics software in this paper.
Fu-Tao Shi +3 more
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Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer [PDF]
Micromachines, 2022 In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained.
Heng Liu, Yu Zhang, Jiale Wu
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