Results 11 to 20 of about 865 (177)

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Micromachines, 2023
In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being ...
Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang, Zhanying Wang   +7 more
doaj   +2 more sources

Implementation of a CMOS/MEMS Accelerometer with ASIC Processes

Micromachines, 2019
This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using
Yu-Sian Liu, Kuei-Ann Wen
doaj   +2 more sources

Design and Implementation of a Micromechanical Silicon Resonant Accelerometer

Sensors, 2013
The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang, Hui Yang, Yang Gao, Liye Zhao, Jinxing Liang   +4 more
doaj   +2 more sources

A high-resolution resonant MEMS accelerometer

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper reports on a vacuum packaged resonant MEMS accelerometer that demonstrates some of the highest sensitivities reported to-date and a ∼7x scale factor enhancement relative to a recently reported prototype, benefiting from a larger proof mass and improved leverage amplification factor.
Xudong Zou, Ashwin A. Seshia
openaire   +2 more sources

Modeling and Analysis of Vibration Coupling in Differential Common-Based MEMS Resonators [PDF]

Micromachines
In differential MEMS resonant sensors, a pair of resonators are interconnected with other structural components while sharing a common substrate. This leads to mutual coupling of vibration energy between resonators, interfering with their frequency ...
Jing Zhang, Zhuo Yang, Tianhao Wu, Zhichao Yao, Chen Lin, Yan Su   +5 more
doaj   +2 more sources

A Resonant MEMS Accelerometer Utilizing AC Polarization

2018 IEEE International Frequency Control Symposium (IFCS), 2018
In this paper, we present a resonant MEMS accelerometer (RXL) using AC polarization voltage as an alternative to the existing DC polarization schemes. By making full use of the intrinsic frequency mixing property of a parallel plate capacitive transducer, we are able to down-convert the oscillation frequency to 10kHz, an order of magnitude lower than ...
Chun Zhao, Guillermo Sobreviela, Milind Pandit, Arif Mustafazade, Sijun Du, Xudong Zou, Ashwin Seshia   +6 more
openaire   +2 more sources

An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer

Sensors, 2009
A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented.
Lei Liu, Xiaojing Shi, Junbo Wang, Deyong Chen, Zhengwei Wu   +4 more
doaj   +2 more sources

Temperature drift suppression and measurement dead zone elimination in differential MEMS resonant accelerometers using dual-mode operating method [PDF]

Microsystems & Nanoengineering
This paper proposes a differential mode measurement and control system (DMCS) for differential MEMS resonant accelerometer (DMRA), which operates the differential resonators of the DMRA at different vibration modes.
Bingchen Zhu, Zheng Wang, Liangbo Ma, Zhaoyang Zhai, Kunfeng Wang, Wuhao Yang, Xiaorui Bie, Xudong Zou   +7 more
doaj   +2 more sources

High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators [PDF]

Proceedings, 2018
A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism.
Cláudia Coelho, João Gaspar, Luís A. Rocha   +2 more
doaj   +3 more sources

Programmable synchronization enhanced MEMS resonant accelerometer. [PDF]

Microsyst Nanoeng, 2020
AbstractAcceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms.
Xu L, Wang S, Jiang Z, Wei X.
europepmc   +4 more sources