Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm [PDF]
MicromachinesThis article describes a global structure optimization methodology for microelectromechanical system devices based on a multi-objective elitist genetic algorithm.
Dongda Yang +10 more
doaj +2 more sources
High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators [PDF]
Proceedings, 2018 A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism.
Cláudia Coelho +2 more
doaj +3 more sources
Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
Micromachines, 2019 This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using
Yu-Sian Liu, Kuei-Ann Wen
doaj +2 more sources
A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit [PDF]
Microsystems & NanoengineeringA differential microelectromechanical system (MEMS) quartz resonant accelerometer with a novel oscillating readout circuit is proposed. The phase noise in a piezoelectric quartz resonant accelerometer has been systematically investigated.
Kai Bu +4 more
doaj +2 more sources
Fiber-optic Fabry–Pérot interferometric accelerometer with composite cavity and temperature calibration for high-temperature and high-pressure applications [PDF]
Microsystems & NanoengineeringTo address the demand for flow-induced vibration monitoring of steam generator heat transfer tubes in pressurized water reactors under high-temperature (350 °C) and high-pressure (17.5 MPa) conditions, a fiber-optic Fabry–Pérot interferometric ...
Feng Qin +6 more
doaj +2 more sources
Modeling and Analysis of Vibration Coupling in Differential Common-Based MEMS Resonators [PDF]
MicromachinesIn differential MEMS resonant sensors, a pair of resonators are interconnected with other structural components while sharing a common substrate. This leads to mutual coupling of vibration energy between resonators, interfering with their frequency ...
Jing Zhang +5 more
doaj +2 more sources
Temperature drift suppression and measurement dead zone elimination in differential MEMS resonant accelerometers using dual-mode operating method [PDF]
Microsystems & NanoengineeringThis paper proposes a differential mode measurement and control system (DMCS) for differential MEMS resonant accelerometer (DMRA), which operates the differential resonators of the DMRA at different vibration modes.
Bingchen Zhu +7 more
doaj +2 more sources
Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
Sensors, 2015 This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork ...
Jing Zhang, Yan Su, Qin Shi, An-Ping Qiu
doaj +3 more sources
Design and Flight Experiment of a Motor-Directly-Driven Flapping-Wing Micro Air Vehicle with Extension Springs [PDF]
BiomimeticsThis study presents the design, control, and flight experiments of a motor-directly-driven flapping-wing micro air vehicle with extension springs (MDD-FWMAVES).
Seungik Choi +3 more
doaj +2 more sources
Design and optimization of a novel tri-axial miniature ear-plug piezoresistive accelerometer with nanoscale piezoresistors [PDF]
, 2013 This work aims at the advancement of state-of-art accelerometer design and optimization methodology by developing an ear-plug accelerometer for race car drivers based on a novel mechanical principle. The accelerometer is used for the measurements of head
Messina, M.
core +7 more sources