Results 21 to 30 of about 334,732 (168)

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers [PDF]

Micromachines, 2021
Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelerometer to achieve higher sensitivity to acceleration ...
Pengcheng Cai, Xingyin Xiong, Kunfeng Wang, Jiawei Wang, Xudong Zou   +4 more
openaire   +3 more sources

Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer

Micromachines, 2023
Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application.
Xiaorui Bie, Xingyin Xiong, Zheng Wang, Wuhao Yang, Zhitian Li, Xudong Zou   +5 more
doaj   +1 more source

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Micromachines, 2023
In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being ...
Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang, Zhanying Wang   +7 more
doaj   +1 more source

A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits

Frontiers in Mechanical Engineering, 2022
MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj   +1 more source

A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity [PDF]

, 2015
This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with ...
Chun Zhao, Zhao, C, Honglong Chang, Xie, Jianbing, Xie, J, Chang, H, Pu, SH, Kraft, M, Kraft, Michael, Chang, Honglong, Pu, Suan-Hui, Michael Kraft, ,, Graham S. Wood, Suan Hui Pu, Zhao, Chun, Wood, GS, Jianbing Xie, Wood, Graham S., Chong, HMH, Chong, Harold M.H., Harold M. H. Chong   +21 more
core   +2 more sources

Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

Micromachines, 2021
A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide ...
Chih-Hsuan Lin, Chao-Hung Song, Kuei-Ann Wen   +2 more
doaj   +1 more source

A High-Sensitivity MEMS Accelerometer Using a Sc_0.8Al_0.2N-Based Four Beam Structure

Micromachines, 2023
In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four
Zhenghu Zhang, Linwei Zhang, Zhipeng Wu, Yunfei Gao, Liang Lou   +4 more
doaj   +1 more source

Suitability of MEMS accelerometers for condition monitoring: An experimental study [PDF]

, 2008
With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen.
Samir Mekid, Pietruszkiewicz, R, Mekid, S., Andrew Starr, Starr, Andrew G., Alhussein Albarbar, Albarbar, A., Robert Pietruszkiewicz   +7 more
core   +1 more source

Design and Implementation of a Micromechanical Silicon Resonant Accelerometer

Sensors, 2013
The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang, Hui Yang, Yang Gao, Liye Zhao, Jinxing Liang   +4 more
doaj   +1 more source

Online sensor testing through superposition of encoded stimulus. [PDF]

, 2007
Online monitoring remains an important requirement for a range of microsystems. The solution based on the injection of an actuating test stimulus into the bias structure of active devices holds great potential.
Bunyan, J., Richardson, A., Richardson, Andrew, Dumas, Norbert, Xu, Zhou, Georgopoulos, Kostas, Xu, Z., Georgopoulos, K., Bunyan, John, Dumas, N.   +9 more
core   +4 more sources