Results 21 to 30 of about 865 (177)

Design and Flight Experiment of a Motor-Directly-Driven Flapping-Wing Micro Air Vehicle with Extension Springs [PDF]

Biomimetics
This study presents the design, control, and flight experiments of a motor-directly-driven flapping-wing micro air vehicle with extension springs (MDD-FWMAVES).
Seungik Choi, Changyong Oh, Taesam Kang, Jungkeun Park   +3 more
doaj   +2 more sources

A Micromachined Silicon-on-Glass Accelerometer with an Optimized Comb Finger Gap Arrangement [PDF]

Micromachines
This paper reports the design, fabrication, and characterization of a MEMS capacitive accelerometer with an asymmetrical comb finger arrangement. By optimizing the ratio of the gaps of a rotor finger to its two adjacent stator fingers, the sensitivity of
Jiacheng Li, Rui Feng, Xiaoyi Wang, Huiliang Cao, Keru Gong, Huikai Xie   +5 more
doaj   +2 more sources

MEMS biaxial resonant accelerometer

, 2011
A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by means of elastic elements in such a way as to be suspended above the substrate, the elastic elements enabling inertial movements of detection of the inertial mass along a first axis of detection and a ...
COMI, CLAUDIA, CORIGLIANO, ALBERTO, B. Simoni   +2 more
openaire   +2 more sources

In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020
In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift.
Shudong Wang, Weilong Zhu, Yajing Shen, Juan Ren, Xueyong Wei   +4 more
openaire   +2 more sources

Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators. [PDF]

Sensors (Basel)
High-frequency sensitivity to external acceleration is crucial for improving the accuracy of MEMS resonant accelerometers. This study proposes utilizing shape optimization of microlevers and resonators to improve sensitivity. Initially, an optimization model for microlevers is established, considering the arm’s shape and the dimensions of the pivots ...
Ran L, Zhao W, Li T, He J, Zhou W.
europepmc   +3 more sources

MEMS resonant accelerometer having improved electrical characteristics

, 2010
A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial
COMI, CLAUDIA, CORIGLIANO, ALBERTO, B. Simoni   +2 more
openaire   +2 more sources

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers [PDF]

Micromachines, 2021
Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelerometer to achieve higher sensitivity to acceleration ...
Pengcheng Cai, Xingyin Xiong, Kunfeng Wang, Jiawei Wang, Xudong Zou   +4 more
openaire   +3 more sources

Analysis of the Thermally Induced Packaging Effects on the Frequency Drift of Micro-Electromechanical System Resonant Accelerometer

Micromachines, 2023
Due to the working principle of MEMS resonant accelerometers, their thermally induced frequency drift is an inevitable practical issue for their extensive application.
Xiaorui Bie, Xingyin Xiong, Zheng Wang, Wuhao Yang, Zhitian Li, Xudong Zou   +5 more
doaj   +1 more source

A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits

Frontiers in Mechanical Engineering, 2022
MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj   +1 more source

Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

Micromachines, 2021
A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide ...
Chih-Hsuan Lin, Chao-Hung Song, Kuei-Ann Wen   +2 more
doaj   +1 more source