Results 211 to 220 of about 14,556 (247)

A high sensitivity uniaxial resonant accelerometer

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is presented. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor. The high level of sensitivity is obtained at relatively low quality factors and keeping the dimensions very small, thanks to
COMI, CLAUDIA, CORIGLIANO, ALBERTO, LANGFELDER, GIACOMO, LONGONI, ANTONIO FRANCESCO, TOCCHIO, ALESSANDRO, B. Simoni   +5 more
openaire   +2 more sources

Microleverage DETF Aluminum Nitride resonating accelerometer

2012 IEEE International Frequency Control Symposium Proceedings, 2012
In this work, we present a novel microleverage Double Ended Tuning Fork (DETF) resonant accelerometer made of thin film piezoelectric Aluminum Nitride (AlN). The development and characterization of this novel design is discussed through a Finite Element Analysis (FEA) and experimentally demonstrated.
Gabriele Vigevani, Fabian T. Goericke, Albert P. Pisano, Igor I. Izyumin, Bernhard E. Boser   +4 more
openaire   +1 more source

Dual mode resonant capacitive MEMS accelerometer

2016 IEEE International Symposium on Inertial Sensors and Systems, 2016
This paper reports the design, fabrication and characterization of a dual mode resonant capacitive MEMS accelerometer. The sensor consists of electrically coupled micro resonators and a proof mass. The applied acceleration causes displacement of the proof mass which changes the electrostatic gap between the proof mass and the sensing electrodes.
Fatemeh Edalatfar, Sadegh Hajhashemi, Bahareh Yaghootkar, Behraad Bahreyni   +3 more
openaire   +1 more source

High-precision BESOI-based resonant accelerometer

Sensors and Actuators A: Physical, 1995
Abstract A uniaxial resonant acceleration sensor for high-precision measurements, made in bulk micromachining, is presented. The high symmetry of the device structure eliminates rotational acceleration components and diminishes cross-axis sensitivities.
Chr. Burrer, J. Esteve
openaire   +1 more source

Design and optimization of a novel resonant accelerometer resonator

SPIE Proceedings, 2006
MEMS resonant accelerometer has been proved to be a delicate accelerometer with high performance. Mechanical resonator is the core component for the design of MEMS resonant accelerometer. With the development of surface micro-machining and bulk micro-machining technology, the silicon resonator has expanded its use to micro-accelerometers.
Shangchun Fan, Zhiping Peng
openaire   +1 more source

Monolithic resonator vibrating beam accelerometer

The Journal of the Acoustical Society of America, 1989
In order to implement a vibrating beam accelerometer, preferably in a dual beam configuration, a monolithic piezoelectric structure which includes at least a first mounting surface, a second mounting surface spaced therefrom and between the mounting surfaces and coupled thereto a vibrating beam, is provided.
openaire   +1 more source

A Novel Optical Microring Resonator Accelerometer

IEEE Sensors Journal, 2007
A unique optical accelerometer based on a microring resonator fabricated on a flexible substrate is experimentally demonstrated and its performance analyzed. This accelerometer measures the applied acceleration by measuring the shift of the resonant wavelength of the flexible microring resonator.
Bipin Bhola, William H. Steier
openaire   +1 more source

An integrated packaged resonant accelerometer with temperature compensation

Review of Scientific Instruments, 2020
This paper describes the design, fabrication, and testing of an integrated packaged sensor that is composed of a micro resonant accelerometer and a temperature sensor. The resonant accelerometer with differential configuration consists of double quartz resonators and a silicon substrate. When acceleration is applied along the sensing axis, the inertial
Bo Li, Cun Li, Yulong Zhao, Chao Han, Quanwei Zhang   +4 more
openaire   +2 more sources

Silicon Resonant Micro Pressure Sensor and Micro Resonant Accelerometer

Advanced Materials Research, 2012
Silicon micro resonant pressure sensor and accelerometer are kinds of new gauging instruments. Both the silicon micro resonant pressure sensor and accelerometer have the particular advantages and become the key development direction of micro sensors. The introduction of silicon micro resonant pressure sensor is carried out first in this paper. The work
Xin Shi, Zheng Zheng Guan, Hua Wu
openaire   +1 more source

A high-resolution resonant MEMS accelerometer

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper reports on a vacuum packaged resonant MEMS accelerometer that demonstrates some of the highest sensitivities reported to-date and a ∼7x scale factor enhancement relative to a recently reported prototype, benefiting from a larger proof mass and improved leverage amplification factor.
Xudong Zou, Ashwin A. Seshia
openaire   +1 more source