Results 231 to 239 of about 287,612 (239)
Some of the next articles are maybe not open access.

Trends and frontiers of MEMS

Sensors and Actuators A: Physical, 2007
Wen H Ko
exaly  

Nanotwinned metal MEMS films with unprecedented strength and stability

Science Advances, 2017
Gi-Dong Sim   +2 more
exaly  

Non-silicon MEMS platforms for gas sensors

Sensors and Actuators B: Chemical, 2016
Alexey Vasiliev   +2 more
exaly  

Summary of Research Status and Application of MEMS Accelerometers

Journal of Computer and Communications, 2018
exaly  

RF MEMS fabrication technologies

2013
K. Grenier, D. Dubuc
openaire   +1 more source

Advances of materials science in MEMS applications: A review

Results in Engineering
Nayem Hossain   +2 more
exaly  

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