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Numerical analysis of Bragg regime polarization gratings by rigorous coupled-wave analysis
SPIE Proceedings, 2017We report on the numerical analysis of Bragg polarization gratings (PGs), especially those formed with liquid crystals, and study their general diffraction properties by Rigorous Coupled-Wave Analysis (RCWA). Different from traditional Bragg (isotropic) gratings, Bragg PGs are verified to have high diffraction efficiency for large field of view, which ...
Xiao Xiang, Michael J. Escuti
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Rigorous coupled wave analysis for deep structures with internal field distribution
2017 IEEE International Conference on Computational Electromagnetics (ICCEM), 2017The rigorous coupled wave analysis is demonstrated by employing a recursive propagation algorithm based on an Airy-like internal reflection series, modified for a general cross-sectional distribution of permittivity. The method is capable of determining the electromagnetic field value at any point of the structure of any depth.
Roman Antos +4 more
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Estimation of the convergence order of rigorous coupled-wave analysis for OCD metrology
SPIE Proceedings, 2011In most cases of optical critical dimension (OCD) metrology, when applying rigorous coupled-wave analysis (RCWA) to optical modeling, a high order of Fourier harmonics is usually set up to guarantee the convergence of the final results. However, the total number of floating point operations grows dramatically as the truncation order increases ...
Yuan Ma +3 more
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Rigorous couple wave analysis - The TE-Polarization Case
2022Millimono, Albert +2 more
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Study on Asymmetric Nanostructure by Rigorous Coupled-Wave Analysis
Journal of the Korean Physical Society, 2010Young Dong Kim +5 more
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Journal of the Optical Society of America A: Optics and Image Science, and Vision, 1995
M G Moharam, T K Gaylord
exaly
M G Moharam, T K Gaylord
exaly
Rigorous coupled-wave analysis of grating diffraction— E-mode polarization and losses
Journal of the Optical Society of America, 1983M G Moharam, T K Gaylord
exaly

