Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices [PDF]
Micromachines, 2018 The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices.
Anand Tatikonda +3 more
doaj +5 more sources
Optimization of Sacrificial Layer Etching in Single-Crystal Silicon Nano-Films Transfer Printing for Heterogeneous Integration Application [PDF]
Nanomaterials, 2021 As one of the important technologies in the field of heterogeneous integration, transfer technology has broad application prospects and unique technical advantages.
Jiaqi Zhang +7 more
doaj +3 more sources
Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance. [PDF]
Microsyst Nanoeng, 2022 Focused ultrasound (FUS) is a powerful tool widely used in biomedical therapy and imaging as well as in sensors and actuators. Conventional focusing techniques based on curved surfaces, metamaterial structures, and multielement phased arrays either ...
Tang Y, Kim ES.
europepmc +2 more sources
Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer. [PDF]
Sci Rep, 2021 Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (
Le PTP, Ten Elshof JE, Koster G.
europepmc +2 more sources
Sacrificial layer-assisted nanoscale transfer printing. [PDF]
Microsyst Nanoeng, 2020 Transfer printing is an emerging assembly technique for flexible and stretchable electronics. Although a variety of transfer printing methods have been developed, transferring patterns with nanometer resolution remains challenging.
Liu J +10 more
europepmc +2 more sources
3D Hydrodynamic Focusing in Microscale Optofluidic Channels Formed with a Single Sacrificial Layer. [PDF]
Micromachines (Basel), 2020 Optofluidic devices are capable of detecting single molecules, but greater sensitivity and specificity is desired through hydrodynamic focusing (HDF). Three-dimensional (3D) hydrodynamic focusing was implemented in 10-μm scale microchannel cross-sections
Hamilton ES +4 more
europepmc +2 more sources
A Fast Route Towards Freestanding Single-Crystalline Oxide Thin Films by Using YBa2Cu3O7-x as a Sacrificial Layer. [PDF]
Nanoscale Res Lett, 2020 Researchers have long been seeking multifunctional materials that can be adopted for next-generation nanoelectronics, and which, hopefully, are compatible with current semiconductor processing for further integration. Along this vein, complex oxides have
Chang YW +6 more
europepmc +2 more sources
Additive–Subtractive Manufacturing Based on Water-Soluble Sacrificial Layer: High-Adhesion Metal Patterning via Inkjet Printing [PDF]
MicromachinesInkjet printing has become a primary technique for manufacturing flexible and conformal electronics due to its digital control, design flexibility, and material compatibility.
Mengyang Su +8 more
doaj +2 more sources
Hard-Baked Photoresist as a Sacrificial Layer for Sub-180 °C Surface Micromachining Processes [PDF]
Micromachines, 2018 This letter proposes a method for utilizing a positive photoresist, Shipley 1805, as a sacrificial layer for sub-180 °C fabrication process flows. In the proposed process, the sacrificial layer is etched at the end to release the structures using a ...
Hani H. Tawfik +3 more
doaj +2 more sources
Fabricating High-Resolution Metal Pattern with Inkjet Printed Water-Soluble Sacrificial Layer
ACS Applied Materials & Interfaces, 2020 Metal pattern plays a crucial role in various optoelectronic devices. However, fabrication of high-resolution metal pattern has serious problems in complicated technique and high cost.
Jiazhen Sun, Yanlin Song, Shuoran Chen
exaly +2 more sources