Results 11 to 20 of about 14,436 (256)

Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes [PDF]

open access: yesNature Communications
Developing an efficient and non-destructive stripping method suitable for most fragile freestanding films is essential for developing industrial semiconductor integration and flexible devices.
Hangren Li   +19 more
doaj   +2 more sources

Research on Processing Technology of Multi-Layer Heterogeneous Material Composite Micron Cantilever Beam Structure

open access: yesMicromachines, 2022
In order to overcome the simplicity and instability of micron cantilever membrane structure, sacrificial layer technology and multi-layer heterogeneous material composite stacking technology were designated.
Yingqi Shang   +4 more
doaj   +1 more source

A Novel Synthesis of ZnO Nanoflower Arrays Using a Lift-Off Technique with Different Thicknesses of Al Sacrificial Layers on a Patterned Sapphire Substrate

open access: yesNanomaterials, 2022
A novel method to synthesize large-scale ZnO nanoflower arrays using a protrusion patterned ZnO seed layer was investigated. Different thicknesses of aluminum (Al) film were deposited on the concave patterned sapphire substrate as a sacrificial layer ...
Hsien-Wei Tseng   +4 more
doaj   +1 more source

Sacrificial layer microfluidic device fabrication methods [PDF]

open access: yesELECTROPHORESIS, 2006
AbstractOver the past 15 years, research in the field of microfluidics has experienced rapid growth due to significant potential advantages such as low cost, short analysis times, and elimination of sources of contamination. Although etched and thermally bonded glass substrates have seen widespread use and offer solid performance, device fabrication ...
Bridget A, Peeni   +3 more
openaire   +2 more sources

The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

open access: yesCeramics, 2020
Piezoelectric thick films are of real interest for devices such as ceramic Micro-ElectroMechanical Systems (MEMS) because they bridge the gap between thin films and bulk ceramics. The basic design of MEMS includes electrodes, a functional material, and a
Hélène Debéda   +6 more
doaj   +1 more source

Study on the Influence Law of Asphalt Anti - Corrosion Coating Protection Efficiency Based on Performance Degradation [PDF]

open access: yesCailiao Baohu, 2022
In China, the sacrificial anode cathodic protection systems of many pipelines in service with asphalt coating have failed or are about to fail. If the sacrificial anode systems are replaced according to the original design, some pipelines could not be ...
ZHANG Yu - xing, CHE Ming, GE Bao - yu, ZHANG Shen - yan, LI Xu, WANG Jie
doaj   +1 more source

Infinite Selectivity of Wet SiO2 Etching in Respect to Al

open access: yesMicromachines, 2020
We propose and demonstrate an unconventional method suitable for releasing microelectromechanical systems devices containing an Al layer by wet etching using SiO2 as a sacrificial layer.
Imrich Gablech   +3 more
doaj   +1 more source

Modified Model for Sacrificial Layer Etching [PDF]

open access: yesJournal of Physics: Conference Series, 2006
Sacrificial layer etching with different structures is studied in this work. It is found that the existed model doesn't match with the experimental data well. A modified model is proposed by considering the diffusion coefficient of HF as a function of temperature and concentration in the solution.
Chang-ju Wu   +3 more
openaire   +1 more source

Study on Explosion-Resistance of Biomimetic Layered Honeycomb Structure

open access: yesAdvances in Civil Engineering, 2020
A new type of explosion-resistant biomimetic layered honeycomb structure was designed based on the natural mechanism and biological inspiration, which was mainly composed of a sacrificial layer and a bearing layer.
Ji Li   +3 more
doaj   +1 more source

Silicon Sacrificial Layer Technology for the Production of 3D MEMS (EPyC Process)

open access: yesProceedings, 2017
The EPyC process uses silicon sacrificial layer technology, which makes it possible to generate high volume sacrificial structures of up to 100 microns thickness.
Latifa Louriki   +3 more
doaj   +1 more source

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