MicromachinesTwo-layer microfluidic devices with porous membranes have been widely used in bioapplications such as microphysiological systems (MPS). Porous electrodes, instead of membranes, have recently been incorporated into devices for electrochemical cell ...
Kosuke Ino +6 more
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Photoresist as a sacrificial layer by dissolution in acetone [PDF]
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2002 We report here a detailed study of sacrificial layer dissolution of photoresist by acetone in microchannels. The effects of channel geometry as well as photoresist characteristics such as thermal cycles and UV exposure are considered and tested. Test channels were designed and fabricated ranging in height from 2 /spl mu/m to 6 /spl mu/m, widths from 10
Walsh, Ken +2 more
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Silicon Sacrificial Layer Technology for the Production of 3D MEMS (EPyC Process)
Proceedings, 2017 The EPyC process uses silicon sacrificial layer technology, which makes it possible to generate high volume sacrificial structures of up to 100 microns thickness.
Latifa Louriki +3 more
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Sacrificial Paste for Fabrication of Ceramic Materials by Layer-By-Layer Method [PDF]
Archives of Metallurgy and Materials, 2016 The aim of the work was to develop a sacrificial paste suitable for securing channels during shaping of ceramic materials with internal structures via combination of tape casting and soft lithography.
Falkowski P., Scisel K.
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A Fast Route Towards Freestanding Single-Crystalline Oxide Thin Films by Using YBa2Cu3O7-x as a Sacrificial Layer [PDF]
Nanoscale Research Letters, 2020 Researchers have long been seeking multifunctional materials that can be adopted for next-generation nanoelectronics, and which, hopefully, are compatible with current semiconductor processing for further integration. Along this vein, complex oxides have
Yao-Wen Chang +6 more
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A‐Site Cationic Variation to Expand the Sacrificial Layer AVO3 Family Dissolving in Water [PDF]
Advanced Materials InterfacesIn the growing field of low‐cost electronics, the epitaxy of complex oxide thin films on a Si substrate requires significant technical means. Therefore, a large attention is paid to the release of a freestanding oxide of interest from its deposition ...
Vincent Polewczyk +14 more
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A novel sacrificial-layer process based on anodic bonding and its application in an accelerometer [PDF]
AIP Advances, 2015 It is found in our experiments that the depletion layer of anodic bonding is etched faster than the bulk glass (Pyrex 7740) in hydrofluoric acid (HF). Based on this interesting phenomenon, a novel process of a sacrificial layer is proposed in this paper.
Lingyun Wang +5 more
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Sacrificial layer concept interface engineering for robust, lossless monolithic integration of perovskite/Si tandem solar cells yielding high fill factor of 0.813 [PDF]
Nano ConvergenceEfficient monolithic perovskite/Si tandem solar cells require a robust recombination junction (RJ) with excellent electrical and optical properties.
Yoon Hee Jang +8 more
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Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes [PDF]
Nature CommunicationsDeveloping an efficient and non-destructive stripping method suitable for most fragile freestanding films is essential for developing industrial semiconductor integration and flexible devices.
Hangren Li +19 more
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A sacrificial layer strategy for photolithography on highly hydrophobic surface and its application for electrowetting devices. [PDF]
Sci Rep, 2017 Zhang H, Yan Q, Xu Q, Xiao C, Liang X.
europepmc +3 more sources