Results 231 to 240 of about 61,657 (284)

A Roadmap for Extreme-Mechanics Hydrogels: From Toughening Mechanisms to Intelligent System Integration. [PDF]

open access: yesNanomicro Lett
Tong A   +11 more
europepmc   +1 more source

Chemical termination and interfacial redox behavior of freestanding SrTiO<sub>3</sub>. [PDF]

open access: yesSci Rep
Wohlgemuth MA   +11 more
europepmc   +1 more source

Room Temperature UV Photodetector Based on Aero-Titania. [PDF]

open access: yesInt J Mol Sci
Nicolaescu M   +10 more
europepmc   +1 more source

Sacrificial layer optimization for RF MEMS switches

Microsystem Technologies, 2020
This paper introduces the characterization of AZ-P4620 photoresist as a sacrificial layer for Radio Frequency MEMS (Micro-Electro-Mechanical System) switches. The surface micromachining process is opted for the fabrication of RF MEMS switches, which includes a suspended structure.
Prem Kumar   +7 more
openaire   +1 more source

Water‐Soluble Sacrificial Layers for Surface Micromachining

Small, 2005
AbstractThis manuscript describes the use of water‐soluble polymers for use as sacrificial layers in surface micromachining. Water‐soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin‐coating, and the solvent removed at a low temperature (95–150 °C), and 2) the resulting layer can be ...
Vincent, Linder   +4 more
openaire   +2 more sources

Sacrificial layers for widely tunable capacitors

IEE Proceedings - Science, Measurement and Technology, 2004
Micromachined two-gap widely tunable capacitors have been fabricated with a tuning ratio of 7.3:1. The design presented requires sub-micron air gaps to enable low voltage operation and to reduce electrode curvature during operation. Photoresist and titanium have been evaluated for use as sacrificial layers in these devices.
A.J. Gallant, D. Wood
openaire   +1 more source

Sacrificial layer etching in bubble structure

Sensors and Actuators A: Physical, 2007
Sacrificial layer etching through a small circle window is studied in this work. It is found that the etching rate decreases with etching time quickly and the etching rate decreases more quickly with a smaller etching window. The existing model cannot fit the experimental data well.
Changju Wu   +3 more
openaire   +1 more source

Dendritic material as a dry-release sacrificial layer

Journal of Microelectromechanical Systems, 1999
A dry-release process using highly structured dendritic material, specifically, hyperbranched polymers (HBP's), has been developed. A particular HBP under study, known as HB560, has been characterized and successfully integrated with microelectromechanical systems processing. An array of electroplated nickel cantilever beams 100 /spl mu/m/spl times/100
H. Suh   +3 more
openaire   +1 more source

Protein patterning using germanium as a sacrificial layer

2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 2017
With the rise of microfluidic diagnostics, there is a need for more efficient methods of patterning surface-attached moieties, including proteins like antibodies, onto microchannel surfaces. This arises because almost all of the solvents and processes used for surface-attachment chemistries (or their payloads) are incompatible with sacrificial layers ...
, Bochao Lu, Michel M, Maharbiz
openaire   +2 more sources

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