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A Roadmap for Extreme-Mechanics Hydrogels: From Toughening Mechanisms to Intelligent System Integration. [PDF]
Tong A +11 more
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Chemical termination and interfacial redox behavior of freestanding SrTiO<sub>3</sub>. [PDF]
Wohlgemuth MA +11 more
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Substrate-adaptive sacrificial corrosion strategy enables 700 mV oxygen evolution window for enhanced seawater electrolysis. [PDF]
Zhang X +9 more
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Room Temperature UV Photodetector Based on Aero-Titania. [PDF]
Nicolaescu M +10 more
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Sacrificial layer optimization for RF MEMS switches
Microsystem Technologies, 2020This paper introduces the characterization of AZ-P4620 photoresist as a sacrificial layer for Radio Frequency MEMS (Micro-Electro-Mechanical System) switches. The surface micromachining process is opted for the fabrication of RF MEMS switches, which includes a suspended structure.
Prem Kumar +7 more
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Water‐Soluble Sacrificial Layers for Surface Micromachining
Small, 2005AbstractThis manuscript describes the use of water‐soluble polymers for use as sacrificial layers in surface micromachining. Water‐soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin‐coating, and the solvent removed at a low temperature (95–150 °C), and 2) the resulting layer can be ...
Vincent, Linder +4 more
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Sacrificial layers for widely tunable capacitors
IEE Proceedings - Science, Measurement and Technology, 2004Micromachined two-gap widely tunable capacitors have been fabricated with a tuning ratio of 7.3:1. The design presented requires sub-micron air gaps to enable low voltage operation and to reduce electrode curvature during operation. Photoresist and titanium have been evaluated for use as sacrificial layers in these devices.
A.J. Gallant, D. Wood
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Sacrificial layer etching in bubble structure
Sensors and Actuators A: Physical, 2007Sacrificial layer etching through a small circle window is studied in this work. It is found that the etching rate decreases with etching time quickly and the etching rate decreases more quickly with a smaller etching window. The existing model cannot fit the experimental data well.
Changju Wu +3 more
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Dendritic material as a dry-release sacrificial layer
Journal of Microelectromechanical Systems, 1999A dry-release process using highly structured dendritic material, specifically, hyperbranched polymers (HBP's), has been developed. A particular HBP under study, known as HB560, has been characterized and successfully integrated with microelectromechanical systems processing. An array of electroplated nickel cantilever beams 100 /spl mu/m/spl times/100
H. Suh +3 more
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Protein patterning using germanium as a sacrificial layer
2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 2017With the rise of microfluidic diagnostics, there is a need for more efficient methods of patterning surface-attached moieties, including proteins like antibodies, onto microchannel surfaces. This arises because almost all of the solvents and processes used for surface-attachment chemistries (or their payloads) are incompatible with sacrificial layers ...
, Bochao Lu, Michel M, Maharbiz
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