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Sacrificial layers for use in fabrications of microelectromechanical devices
2005PATEL SATYADEV R, DOAN JONATHAN C
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MEMS devices with multi-component sacrificial layers
2011TUNG MING-HAU, KOGUT LIOR
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Plasma sculpturing with a non-planar sacrificial layer
1985GIMPELSON GEORGE E, RUSSO CHERYL L
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