Results 261 to 270 of about 61,657 (284)

Frontside micromachining using purous-silicon sacrificial-layer technologies

Sensors and Actuators A: Physical, 1997
Abstract Several electro- and photo-electrochemical processes are pointed out which allow silicon microstructures to be formed within ion-implanted silicon wafers. It is shown how different lateral and vertical doping profiles can be used to anodize selectively parts of the ion-implanted silicon wafers, creating isolated regions of porous silicon ...
Th Bischoff, G Müller, W Welser, F Koch
openaire   +1 more source

Metallic Microactuators Based on Sacrificial Layer SU8 Release

Microelectromechanical Systems, 2003
Thermal micro-actuators are a promising solution to the need for large-displacement, low-power MEMS actuators. Potential applications of these devices are micro-relays, tunable impedance RF networks, and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU8 is described.
Eniko T. Enikov, Kalin V. Lazarov
openaire   +1 more source

Sacrificial layer electrophoretic deposition of free-standing multilayered nanoparticle films

Chemical Communications, 2009
Sacrificial layer electrophoretic deposition (SLED) is a technique to assemble nanoparticles that yields free-standing, multilayered nanoparticle films with macroscopic lateral dimensions after the sacrificial layer is dissolved.
Saad A, Hasan, Dustin W, Kavich, James H, Dickerson   +2 more
openaire   +2 more sources

Sacrificial Adhesion Promotion Layers for Copper Metallization of Device Structures

Langmuir, 2004
The adhesion of copper films to adjacent device layers including TiN, Ta, and TaN diffusion barriers is a crucial reliability issue for integrated circuits. We report that ultrathin layers of poly(acrylic acid) (PAA) prepared on barrier surfaces or on the native oxide of Si wafers dramatically increase the interfacial adhesion of Cu films deposited by ...
Yinfeng, Zong, Xiaoying, Shan, James J, Watkins   +2 more
openaire   +2 more sources

Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process

2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM), 2022
Shinya Kudo, Satoshi Tokai, Takahiko Yanagitani   +2 more
openaire   +1 more source

A Generic Sacrificial Layer for Wide‐Range Freestanding Oxides with Modulated Magnetic Anisotropy

Advanced Functional Materials, 2022
Nianpeng Lu, Shengchun Shen, Lei Gao
exaly  

Stable Cycling of All‐Solid‐State Batteries with Sacrificial Cathode and Lithium‐Free Indium Layer

Advanced Functional Materials, 2022
Hee-Dae Lim, Jun-Woo Park, Yoon-Cheol Ha
exaly  

A Versatile Sacrificial Layer for Transfer Printing of Wide Bandgap Materials for Implantable and Stretchable Bioelectronics

Advanced Functional Materials, 2020
Tuan Khoa Nguyen, Raja Kumar Vadivelu, Toan Dinh   +2 more
exaly  

Fabricating High-Resolution Metal Pattern with Inkjet Printed Water-Soluble Sacrificial Layer

ACS Applied Materials & Interfaces, 2020
Jiazhen Sun, Shuoran Chen, Yan-Lin Song
exaly  

Sacrificial layer-assisted one-step transfer printing for fabricating a three-layer dry electrode

Sensors and Actuators A: Physical, 2020
Jun-shan Liu, Liping Qi, Xiaoguang Hu
exaly