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Sacrificial layer optimization for RF MEMS switches
Microsystem Technologies, 2020This paper introduces the characterization of AZ-P4620 photoresist as a sacrificial layer for Radio Frequency MEMS (Micro-Electro-Mechanical System) switches. The surface micromachining process is opted for the fabrication of RF MEMS switches, which includes a suspended structure.
Prem Kumar +7 more
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Sacrificial layer etching process in joint channels
Journal of Micromechanics and Microengineering, 2006A sacrificial layer etching process in joint channels is studied in this paper. If the etching process proceeds from a wide channel to a narrow one, the etching front presents a straight line during the whole process according to the experiments. If the etching process proceeds from a narrow channel connected with a wide channel, it is an arc rather ...
Changju Wu +4 more
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Planarization of photoresist sacrificial layer for MEMS fabrication
Microelectronic Engineering, 2007We describe a process to improve the planarization and the thermal stability of a polymeric sacrificial layer, which is used for the release of MEMS structures. This process involves a novolak matrix polymer. We show that the sacrificial layer topography critically depends on the process conditions, and we determine optimized methods based on a bi ...
Sofiane Soulimane +4 more
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A Novel Method of Removing Polyimide Sacrificial Layer
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2006Due to the trade secrets and intellectual property, there are still many aspects of MEMS switches which are not understand well and are currently under investigation. In this paper, our report shows that MEMS can be released using O2 and a little carbon powder at the same time.
Xinglong Guo +4 more
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Nanogap electrode formation by sacrificial layer technique
2014 IEEE 2nd International Conference on Emerging Electronics (ICEE), 2014This paper presents a controlled lateral etching-based technique for realizing nanogap structures. These structures have applications in different bio-medical/ biochemical sensors. The sensitivity of such sensors depends on the gap size. The method method uses single mask lithography, followed by etching for the first electrode material and lift-off ...
Sachin Dhariwal +5 more
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Applying Technique of Sacrificial Layer for the Fabrication of Microfilter
2010 4th International Conference on Bioinformatics and Biomedical Engineering, 2010Biochip plays an important role in biotechnology and many scientists also pay a lot of attention on this product. Thus, in this study we used MEMS and sacrificial layer techniques to manufacture the microfilter. It only depends on different development properties of the positive and negative photoresists. The feature size of filtration can be precisely
Yaw-Jen Chang +2 more
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Sacrificial Oxide Layer for Drug Delivery
2007Since the invention of silicon microfabrication technology in early 1960s, the integrated circuit (IC) has changed our world. During last 40 years, the semiconductor industry has come up as the fastest growing industry in our history. From a modest beginning, that allowed few transistors on a chip, we have reached integration level of tens of millions ...
Piyush M. Sinha, Mauro Ferrari
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
Abstract Previous work by the authors has shown that the sputtering limitation often associated with high-dose, heavy-ion implantation can be overcome by implanting through a thin “sacrificial” surface layer of low sputter yield material. Thus far C and Al have proven to be successful sacrificial layer materials, enabling dose retentions of 100% to ...
A.G. Duffy +3 more
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Abstract Previous work by the authors has shown that the sputtering limitation often associated with high-dose, heavy-ion implantation can be overcome by implanting through a thin “sacrificial” surface layer of low sputter yield material. Thus far C and Al have proven to be successful sacrificial layer materials, enabling dose retentions of 100% to ...
A.G. Duffy +3 more
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Homeotropic Alignment of a Discotic Liquid Crystal Induced by a Sacrificial Layer
The Journal of Physical Chemistry C, 2009A convenient method to induce face-on orientation of an alkoxy phtalocyanine discotic mesogen is described. The alignment is imposed by the confinement of the discotic thin films with a top sacrificial polymer layer that is easily removed by washing with a selective solvent, after thermal annealing.
Pouzet, Eric +9 more
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Sacrificial Adhesion Promotion Layers for Copper Metallization of Device Structures
Langmuir, 2004The adhesion of copper films to adjacent device layers including TiN, Ta, and TaN diffusion barriers is a crucial reliability issue for integrated circuits. We report that ultrathin layers of poly(acrylic acid) (PAA) prepared on barrier surfaces or on the native oxide of Si wafers dramatically increase the interfacial adhesion of Cu films deposited by ...
Yinfeng, Zong +2 more
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