Results 301 to 310 of about 18,777 (327)

A new sacrificial layer process for the fabrication of micromechanical systems

Journal of Micromechanics and Microengineering, 1997
A new process using photoresists as sacrificial layers has been developed to fabricate micromechanical components and systems. Commonly used photoresists are spun on a substrate as a sacrificial layer and patterned by a mask aligner. Free-standing metal structures are built by patterning a second layer of thick photoresist and electroplating on top of ...
Zheng Cui, Ron A Lawes
openaire   +1 more source

Trench multiplication process by a sacrificial SiGe epitaxial Layer

25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014), 2014
Trench etching is an important process step for many semiconductor applications. Memory implementations, power devices and embedded capacitors benefit from lateral shrinkage of trench dimensions. But for physical reasons the depth of a trench that can be achieved for a given diameter is limited.
Thomas Popp, Rudolf Berger, Stefan Pompl
openaire   +1 more source

The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay

Advanced Materials Research, 2009
The armature fabricated with the sacrificial layer techniques is an important part of micro electromagnetic relay. So the sacrificial layer is one of the key fabrication processes in the realization of prototype of micro electromagnetic relay. In this paper several sacrificial layers including Copper, Polyimide and Positive photoresist are studied ...
Ben Dong Liu, De Sheng Li, Jia Hui Yang
openaire   +1 more source

Surface micromachined platforms using electroplated sacrificial layers

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2002
A technique for the surface micromachining of structures suspended many tens of microns above a substrate surface is presented. Electroplated metal sacrificial layers are used in a standard surface micromachining process to achieve the necessary sacrificial layer thickness. The process is demonstrated using copper as the sacrificial layer and polyimide
Y.W. Kim, M.G. Allen
openaire   +1 more source

Silicon dioxide sacrificial layer etching in surface micromachining

Journal of Micromechanics and Microengineering, 1997
Silicon dioxide sacrificial layer etching has become a major surface micromachining method to fabricate microsensors and microactuators often made of polycrystalline silicon. An overview of the materials available in integrated circuit manufacturing is given, and the etch mechanism and sacrificial layer etch kinetics are reviewed.
J Bühler, F-P Steiner, H Baltes
openaire   +1 more source

Compound sacrificial layer process for RF MEMS applications

2009 3rd IEEE International Symposium on Microwave, Antenna, Propagation and EMC Technologies for Wireless Communications, 2009
Compound sacrificial layer has been developed for RF membrane bridge switch in micro electro mechanical systems (MEMS) tunable filters. The compound sacrificial layer consisting of polyimide and positive photoresist is used to avoid drawbacks which will occur when only polyimide or positive photoresist is used as sacrificial layer for suspended ...
Yong-hua Zhang, Chao Wang, Wei-xia Ouyang, Zong-sheng Lai   +3 more
openaire   +1 more source

A sacrificial layer approach to highly laminated magnetic cores

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 2003
The incorporation of laminations into micromachined magnetic components has the potential to reduce eddy current losses induced in the cores of these components. This paper reports a manufacturing technique for the fabrication of highly laminated cores.
null Jin-Woo Park, F. Cros, M.G. Allen
openaire   +1 more source

Fabricating High-Resolution Metal Pattern with Inkjet Printed Water-Soluble Sacrificial Layer

ACS Applied Materials & Interfaces, 2020
Jiazhen Sun, Shuoran Chen, Fuqiang Chu   +2 more
exaly  

Etching Sr3Al2O6 sacrificial layer to prepare freestanding GBCO films with high critical current density

Ceramics International, 2021
Yongsheng Liu
exaly  

Sacrificial layer-assisted one-step transfer printing for fabricating a three-layer dry electrode

Sensors and Actuators A: Physical, 2020
Junshan Liu, Liping Qi, Hong Tang
exaly