Results 71 to 80 of about 18,777 (327)
LPCVD Silicon Dioxide Sacrificial Layer Etching for Surface Micromachining
, 1992 The key step in producing a movable microstructure is the controllable sacrificial layer etching process. For the current study, a 1 μm silicon-rich silicon nitride structural layer was deposited on a 2 μm phosphosilicate glass (PSG) sacrificial layer ...
David J. Monk +2 more
core +1 more source
Cyclic Olefin Copolymers as Versatile Materials for Advanced Engineering Applications
Advanced Functional Materials, EarlyView.Cyclic olefin copolymers (COCs) are presented as highly versatile materials combining tunable synthesis, excellent optical properties, and mechanical robustness. Their potential spans microfluidics, bioengineering, and advanced electronics, while emerging self‐healing and sustainable solutions highlight future opportunities.
Giulia Fredi +3 more
wiley +1 more source
MEMS Cantilevers - Sacrificial Layer Removal
, 2012 This animation, created by Support Center for Microsystems Education (SCME), "illustrates the removal or etch of the sacrificial layer of silicon dioxide. Removing this layer allows the micro-cantilevers to move.
core +1 more source
Buckling of polysilicon microbeams during sacrificial layer removal [PDF]
Journal of Micromechanics and Microengineering, 1998 In situ observations of buckling evolution of polysilicon microbeams during etch of the underneath sacrificial layer were carried out under an optical microscope. The surface geometry was obtained by AFM measurements. As the etching progressed, three buckling patterns were identified. Closed formulas were derived from theoretical analysis based on both
Zhang, Tongyi +2 more
openaire +2 more sources
Light‐Actuated Fiber‐Climbing Inchworm Robot Toward Endoluminal Navigation
Advanced Functional Materials, EarlyView.A kirigami‐inspired soft inchworm robot harnesses optical energy from a customized side‐emitting optical fiber, guaranteeing its propulsion along the fiber body. The wavelength‐selective responsiveness of dye‐functionalized liquid crystal elastomers and the application of temporal illumination patterns enable sequential control of robot components. The
Antonio Lobosco +6 more
wiley +1 more source
Modeling of Sacrificial Layer Residue Effect in Nano-Electro-Mechanical Nonvolatile Memory
, 2011 The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics.
Yong Joo Jee, Il Hwan Cho
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SensorsSensor miniaturization offers significant advantages, including enhanced SoC integration efficiency, reduced cost, and lightweight design. While the roll-to-roll printed electronics fabrication process is advantageous for the mass production of sensors ...
Sang Hoon Lee +2 more
doaj +1 more source
Advanced Functional Materials, EarlyView.Our study demonstrates Brønsted base‐mediated proton transfer for HOAc dissociation regulation in weakly acidic electrolytes, where imidazole achieves optimal dynamic proton equilibrium‐simultaneously stabilizing Zn anodes and enabling efficient Mn2+/MnO2 conversion.
Wenli Xin +7 more
wiley +1 more source
High-precision fabrication of Pd film by laser rear-side ablation with thick sacrificial layer
, 2011 Thermal damage can be a major problem in laser machining thin films. This paper proposes a laser rear-side ablation technique that incorporates a sacrificial layer to absorb excess energy, thereby lessening the level of thermal damage created in the ...
K D Wang +4 more
core +1 more source
Study on the Splash Zone Corrosion Protection of Carbon Steel by Sacrificial Anode
International Journal of Electrochemical Science, 2012 The reason that sacrificial anode can not work properly in the area of splashed zone is that there is no stable electrolytes around the metalwork to enable the anode to function.
Jun Chen, Yanliang Huang, Xiqing Dong
doaj +1 more source