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Method of manufacturing piezoelectric elements using sacrificial material

2005
NAGAHARA HIDETOMO   +6 more
openaire   +1 more source

Processing a sacrificial material during manufacture of a microfabricated product

2016
DENIFL GUENTER   +4 more
openaire   +1 more source

Method of making damascene diodes using sacrificial material

2011
MAKALA RAGHUVEER S   +5 more
openaire   +1 more source

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