Results 11 to 20 of about 1,828 (206)
Coherent Fourier Scatterometry for defect detection on SiC samples [PDF]
EPJ Web of Conferences, 2022 Coherent Fourier Scatterometry (CFS) is a scatterometry technique that has been applied for grating and nanoparticle detection. Here, it has been challenged to verify the detectability of the so-called killer defects on SiC samples for power electronic ...
Rafighdoost Jila +2 more
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Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry [PDF]
Journal of the European Optical Society-Rapid Publications, 2015 An extension of Fourier scatterometry is presented, aiming at increasing the sensitivity by measuring the phase difference between the reflections polarized parallel and perpendicular to the plane of incidence.
Petrik P. +7 more
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Scanning effects in coherent fourier scatterometry [PDF]
Journal of the European Optical Society-Rapid Publications, 2012 Incoherent Fourier Scatterometry (IFS) is a successful tool for high accuracy nano-metrology. As this method uses only far field measurements, it is very convenient from the point of view of industrial applications.
Roy S. +4 more
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High Harmonic Generation driven Extreme Ultraviolet 0th order Scatterometry for Nanostructure Characterization [PDF]
EPJ Web of ConferencesWe introduce a tabletop high harmonic generation (HHG) scatterometry technique to extract structural and material characteristics of periodic nanostructures. Grazing incidence reflection scatterometry enables fast and robust measurements of linewidth and
Corazza Francesco +6 more
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Perspective: Optical measurement of feature dimensions and shapes by scatterometry
APL Materials, 2018 The use of optical scattering to measure feature shape and dimensions, scatterometry, is now routine during semiconductor manufacturing. Scatterometry iteratively improves an optical model structure using simulations that are compared to experimental ...
Alain C. Diebold +2 more
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Coherent Fourier scatterometry for particle detection on structured surfaces [PDF]
EPJ Web of Conferences, 2022 We demonstrate the detection of particles/contamination present on a structured surface using Coherent Fourier scatterometry (CFS) by applying Fourier filtering to the scanned maps, which eliminates background effects due to the electronic noise as well ...
Paul Anubhav +2 more
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Automatic feature selection in EUV scatterometry
Applied Optics, 2019 Scatterometry is an important nonimaging and noncontact method for optical metrology. In scatterometry certain parameters of interest are determined by solving an inverse problem. This is done by minimizing a cost functional that quantifies the discrepancy among measured data and model evaluation.
Ansuinelli, P. (author) +2 more
openaire +6 more sources
Establishing traceability of scatterometry to the SI meter
EPJ Web of Conferences, 2010 We present an uncertainty estimate for numerical reconstruction of grating profiles using scatterometry and show how traceability to the SI meter may be obtained using measurement standards.
Nielsen L., Hansen P-E.
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Recent developments in coherent Fourier scatterometry [PDF]
EPJ Web of ConferencesCoherent Fourier Scatterometry (CFS) enables low-power, high- resolution, non-destructive metrology for nanoscale structures. Recent advancements have extended its applications to improving the measurement of critical dimensions, such as steep-sidewall ...
Paul Anubhav +2 more
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A virtual microscope for simulation of Nanostructures [PDF]
EPJ Web of Conferences, 2022 Light-matter interplay is widely used for analyzing the topology of surfaces on small scales for use in areas such as nanotechnology, nanoelectronics, photonics, and advanced materials.
Hansen Poul-Erik, Siaudinyte Lauryna
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