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Manufacturing compound semiconductors
SPIE Photonex Industry Talks, 2020In recent decades, the story of the growth in photonics across a wide range of consumer and industrial applications is also the story of compound semiconductors. From data storage to optical communications, advances in compound semiconductor technologies are driving the revolution on photonics enabled devices that will be central to next generation ...
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Benchmarking semiconductor manufacturing
1997 IEEE International Integrated Reliability Workshop Final Report (Cat. No.97TH8319), 1996We are studying the manufacturing performance of semiconductor wafer fabrication plants in the US, Asia, and Europe. There are great similarities in production equipment, manufacturing processes, and products produced at semiconductor fabs around the world.
R.C. Leachman, D.A. Hodges
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Semiconductor Manufacturers Feel the Heat
Communications of the ACMConsidering technologies for improving thermal management.
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Optimization of Timelinks in Semiconductor Manufacturing
2023 Winter Simulation Conference (WSC), 2023Nina Dybowski +2 more
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Semiconductor development for manufacturability
[1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, 2002IBM's most advanced development fabricator, the Advanced Semiconductor Technology Center (ASTC), has been designed to permit semiconductor development with technology transfer and manufacturability as primary objectives. Facilities, materials, equipment, and processes have been optimized through vendor interactions and collaboration. Attention has also
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Semiconductor manufacturing intelligence and automation
Computers & Industrial Engineering, 2016Chen-Fu Chien 0001 +3 more
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Semiconductor Manufacturing Automation
2009We review automation requirements and technologies for semiconductor manufacturing. We first discuss equipment integration architectures and control to meet automation requirements for modern fabs. We explain tool architectures and operational issues for modern integrated tools such as cluster tools, which combine several processing modules with wafer ...
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