Results 231 to 240 of about 1,030,278 (260)
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Sensors and Actuators A: Physical, 2007
Abstract Pattern deposition of metals with controlled and microscale dimensions can be a challenging task if traditional photolithography is not a practical option. This is a particularly valid concern for the case of certain polymer substrates, which are gaining in importance in the microelectronics and related industries.
Alexis Abramson, Pankaj B Kaul
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Abstract Pattern deposition of metals with controlled and microscale dimensions can be a challenging task if traditional photolithography is not a practical option. This is a particularly valid concern for the case of certain polymer substrates, which are gaining in importance in the microelectronics and related industries.
Alexis Abramson, Pankaj B Kaul
exaly +2 more sources
A Close Proximity Self-Aligned Shadow Mask for Sputter Deposition Onto a Membrane or Cavity
Journal of Micromechanics and Microengineering, 2008In this paper we report on the fabrication of a close proximity shadow mask designed for sputtering into cavities or onto the back surface of freestanding silicon nitride (SiNx) membranes. Sputtering into a well-defined area on a fragile surface is difficult since sputter deposition through a shadow mask separated from the deposition surface typically ...
Liang Hu, Leslie H Allen, Eric A Olson
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Integrated Shadow Mask for Full Angle Deposition in Fabrication of Passive Matrix OLED Displays
2005 7th Electronic Packaging Technology Conference, 2006This paper reports a novel structural design of an integrated shadow mask and its fabrication process that can be used for fabrication of passive matrix OLED displays. The integrated shadow mask is composed of two components: laterally spaced and electrically insulating pillars with retrograded side walls and humps disposed nearby the retrograde side ...
Z.H. Huang, G.J. Qi, X.T. Zeng
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Precise, scalable shadow mask patterning of vacuum-deposited organic light emitting devices
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1999We demonstrate a scheme to pattern vacuum-deposited, small molecular weight organic light emitting diodes (OLEDs). Both the organic thin films and the metallic electrodes are patterned by shifting the position of a single shadow mask which accompanies the substrate throughout the deposition process.
P. F. Tian +5 more
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Site-controlled droplet epitaxy of GaAs quantum dots by deposition through shadow masks
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2018Droplet epitaxy is a versatile method for fabricating nanostructures, but the standard process relies on spatially random droplet formation resulting in poor control of the position of the final nanostructure. The authors demonstrate site-controlled droplet formation utilizing local Ga deposition combined with self-assembled droplet formation.
Viktoryia Zolatanosha, Dirk Reuter
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Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition
Sensors and Actuators A: Physical, 2004Abstract We introduce a micro-machined cantilever type probe card with a special tip shape made of single crystal silicon. A novel process for the micro-machined probe card with a sharp tip formation was developed and micro probe arrays of 40 μm in pitch were also realized.
Younghak Cho +4 more
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Thin Solid Films, 2008
Abstract PDMS (polydimethylsiloxane) shadow masks were fabricated by replica molding using laser-patterned metal shadow masks as primary templates, which were applied to solution as well as vapor deposition to prepare patterned thin films on solid substrates.
J.H. Lee +5 more
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Abstract PDMS (polydimethylsiloxane) shadow masks were fabricated by replica molding using laser-patterned metal shadow masks as primary templates, which were applied to solution as well as vapor deposition to prepare patterned thin films on solid substrates.
J.H. Lee +5 more
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Thin silicon shadow masks for organic light-emitting diodes (OLED) deposition processes
SPIE Proceedings, 2006In this paper, we report thin silicon shadow masks used for vacuum thermal evaporation (VTE) for manufacturing compact-size OLED (organic light emitting diodes) displays. Currently, the OLED displays attract many research attentions because of novel organic materials for emitting the light at relative low cost.
Ching-Chang Tseng +4 more
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Wafer-Scale Ferromagnetic Shadow Mask Compatible With Contact Aligner for Dry Etching and Deposition
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)Jungchul Lee, Taeyeong Kim
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Pulsed laser deposition of YBCO thin films in a shadow mask configuration
Thin Solid Films, 2000Abstract We present an investigation on a modified pulsed laser deposition method (PLD) that employs plume geometric shadowing (Nd:YAG laser, 1.06 μm, 2.5 J/cm 2 , YBCO target). A plane shadow mask and a newly proposed helical mask were used. The aim of our approach was to improve the film surface morphology.
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