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Silicon-on-Insulator for VLSI and VHSIC

1982
Publisher Summary This chapter addresses the application of silicon-on-insulator (SOI) structures to very large-scale integrated (VLSI) circuits based on micro-structures whose dimensions are in the neighborhood of one micron and less. This class of integrated circuits also includes those circuits planned in the very high-speed integrated circuit ...
H.W. LAM, A.F. TASCH, R.F. PINIZZOTTO
openaire   +1 more source

ION BEAM PROCESSING FdR SILICON-ON-INSULATOR

1989
During the last few years ion beam processing penetrated very aggressively in many branches of advanced solid state technology. This holds also for the modern semiconductor technology in the area of VLSI (Very Large Scale Integration) and ULSI (Ultra Large Scale Integration).
openaire   +1 more source

Silicon on Insulator

2003
S. Cristoloveanu, F. Balestra
openaire   +1 more source

Silicon-on-insulator

2001
A. Plössl, U.M. Gösele
openaire   +1 more source

Silicone Composite Insulators

2013
Konstantin O. Papailiou, Frank Schmuck
openaire   +1 more source

Silicon on Insulator Integrated Circuits

1982
In the past, high complexity SOS IC chips were used in specialized applications, requiring high speeds and high levels of radiation hardness, which cannot be attained with standard silicon microcircuits.
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Bonding of silicon wafers for silicon‐on‐insulator

Journal of Applied Physics, 1988
W P Maszara
exaly  

Silicon carbide on insulator formation by the Smart-Cut® process

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1997
L Di Cioccio, F Letertre, Y Le Tiec
exaly  

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