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Silicon-on-Insulator for VLSI and VHSIC
1982Publisher Summary This chapter addresses the application of silicon-on-insulator (SOI) structures to very large-scale integrated (VLSI) circuits based on micro-structures whose dimensions are in the neighborhood of one micron and less. This class of integrated circuits also includes those circuits planned in the very high-speed integrated circuit ...
H.W. LAM, A.F. TASCH, R.F. PINIZZOTTO
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ION BEAM PROCESSING FdR SILICON-ON-INSULATOR
1989During the last few years ion beam processing penetrated very aggressively in many branches of advanced solid state technology. This holds also for the modern semiconductor technology in the area of VLSI (Very Large Scale Integration) and ULSI (Ultra Large Scale Integration).
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Silicon on Insulator Integrated Circuits
1982In the past, high complexity SOS IC chips were used in specialized applications, requiring high speeds and high levels of radiation hardness, which cannot be attained with standard silicon microcircuits.
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Bonding of silicon wafers for silicon‐on‐insulator
Journal of Applied Physics, 1988W P Maszara
exaly
Silicon carbide on insulator formation by the Smart-Cut® process
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1997L Di Cioccio, F Letertre, Y Le Tiec
exaly

