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Silicon Photonics: silicon nitride versus silicon-on-insulator
Optical Fiber Communication Conference, 2016Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.
Baets, Roel G. +9 more
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Production of Silicon Nitride Powder by Direct Nitridation of Silicon
1999The oldest and very common way until today, to produce silicon nitride powder is a direct nitridation of silicon. High purity alpha-Si3N4 powders can be produced by using pure and fine powders. Control of exothermic nitridation reaction is necessary.
Hršak, Damir +2 more
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Journal of the European Ceramic Society, 1997
Abstract Interphase boundaries between hexagonal boron nitride and β-Si 3 N 4 in hot isostatically pressed Si 3 N 4 -SiC particulate composites, in which boron nitride appears as a trace contaminant, have been examined using high resolution transmission electron microscopy.
Turan, Servet, Knowles, K. M.
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Abstract Interphase boundaries between hexagonal boron nitride and β-Si 3 N 4 in hot isostatically pressed Si 3 N 4 -SiC particulate composites, in which boron nitride appears as a trace contaminant, have been examined using high resolution transmission electron microscopy.
Turan, Servet, Knowles, K. M.
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The structure of silicon nitride films I. Stoichiometric silicon nitride
Physica Status Solidi (a), 1978The short-range order is analysed in silicon nitride films obtained in a gas phase of the silane–ammonia mixture (from 1:50 to 5:1) and in the silane–ammonia–oxygen mixtures. It is shown that in the first case amorphous films are formed which are close in structure to the mixture of microclusters of silicon and silicon nitride at the silane–ammonia ...
F. L. Edelman +3 more
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Wetting and infiltration of nitride bonded silicon nitride by liquid silicon
Journal of Crystal Growth, 2016Abstract Nitride bonded silicon nitride (NBSN) is a promising crucible material for the repeated use in the directional solidification of multicrystalline (mc) silicon ingots for photovoltaic applications. Due to wetting and infiltration, however, silicon nitride in its initial state does not offer the desired reusability.
V. Schneider, C. Reimann, J. Friedrich
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Graphene on silicon-nitride photodetector
SPIE Micro + Nano Materials, Devices, and Applications 2019, 2019Even though graphene is a gapless material, it demonstrates strong interband absorption from a broad range of wavelengths between VIS and NIR. Recent photocurrent graphene-based detectors demonstrated strong photoresponse signal near the graphene/metal boundaries.
Varapnickas, Simonas +10 more
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NITRIDATION OF SILICON WITH AMMONIA AND NITROGEN
International Journal of Nanoscience, 2010Silicon nitride and silicon oxynitride are materials used extensively in mechanical and electronic devices due to their outstanding properties. Thin films of silicon nitride and silicon oxynitride can be deposited on a silicon surface. In this study, nitridation of silicon wafers by a rapid thermal heating process with both nitrogen and ammonia as ...
Chaustowski, Rene +4 more
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Silicon Nitride Nanosieve Membrane
Nano Letters, 2004An array of very uniform cylindrical nanopores with a pore diameter as small as 25 nm has been fabricated in an ultrathin micromachined silicon nitride membrane using focused ion beam (FIB) etching. The pore size of this nanosieve membrane was further reduced to below 10 nm by coating it with another silicon nitride layer.
Tong, D.H. +6 more
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Cyclic Fatigue of Silicon Nitrides and a Whisker-Reinforced Silicon Nitride
1992Cyclic stresses derived from mechanical loads or temperature changes are common in engines. Compression-tension cycling is recently found to degradate the mechanical properties of common engineering ceramic materials. In this study, the cyclic fatigue behaviour of sintered and hot-pressed silicon nitride is compared to the behaviour of SiC-whisker ...
T. A. Mäntylä +4 more
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Silicon Nitride: A Bioceramic with a Gift
ACS Applied Materials & Interfaces, 2019In the closing decades of the 20th century, silicon nitride (Si3N4) was extensively developed for high-temperature gas turbine applications. Technologists attempted to take advantage of its superior thermal and mechanical properties to improve engine reliability and fuel economy.
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