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SILICON ON INSULATOR TECHNOLOGY
International Journal of High Speed Electronics and Systems, 1999Silicon On Insulator (SOI) has been developed to accompany the CMOS technology and take the relay when bulk silicon faces processing frontiers. Such limitations have not occurred quickly enough, therefore SOI remains restricted to niche applications, essentially in the field of radiation-hard integrated circuits. It has been a long wait.
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Frontiers of silicon-on-insulator
Journal of Applied Physics, 2003Silicon-on-insulator (SOI) wafers are precisely engineered multilayer semiconductor/dielectric structures that provide new functionality for advanced Si devices. After more than three decades of materials research and device studies, SOI wafers have entered into the mainstream of semiconductor electronics.
George K. Celler, Sorin Cristoloveanu
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Bonding of silicon wafers for silicon-on-insulator
Journal of Applied Physics, 1988Several aspects of a new silicon-on-insulator technique utilizing bonding of oxidized silicon wafers were investigated. The bonding was achieved by heating in an inert atmosphere a pair of wafers with hydrophilic surfaces contacted face-to-face. A quantitative method for the evaluation of the surface energy of the bond based on crack propagation theory
G. Goetz +3 more
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Silicon-on-insulator technology
IEE Proceedings I Solid State and Electron Devices, 1986The last few years have seen considerable progress in the development of techniques for producing silicon-on-insulator (SOI) substrates suitable for fabrication of high performance devices/circuits. Among the most promising of the new ideas are those based on buried dielectric formation by ion implantation (oxygen or nitrogen), recrystallisation of ...
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Optomechanical cavities in silicon-on-insulator
Integrated Optics: Devices, Materials, and Technologies XXVII, 2023Integrated optomechanical cavities allow precise control of optical and mechanical modes and enable strong photonphonon interactions in micron-scale volume, key for the implementation of microwave-photonic oscillators and quantum transducers. Silicon photonics provides low production cost and compatibility with the state-of-art optoelectronic circuitry.
Zhang, Jianhao +7 more
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Physics Bulletin, 1985
There has always been interest in the growth of silicon–on–insulators (soi), usually on sapphire, to give increased resistance to nuclear radiation for space and military applications. However, recently, new techniques for growth have been researched, and the silicon device interest has widened as the potential of insulating substrates for use with ...
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There has always been interest in the growth of silicon–on–insulators (soi), usually on sapphire, to give increased resistance to nuclear radiation for space and military applications. However, recently, new techniques for growth have been researched, and the silicon device interest has widened as the potential of insulating substrates for use with ...
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Silicon on insulator optoelectronics [PDF]
, 2001 These Ecole polytechnique federale de Lausanne EPFL, n° 2487 (2001)Faculte des sciences et techniques de l'ingenieurInstitut de microtechniqueJury: Marc Ilegems, Mihai Adrian Ionescu, K. Petermann, Philippe Renaud, Alfred Rufer, Luc Thevenaz, Jorg Troger Public defense: 2001-12-14 Reference doi:10.5075/epfl-thesis-2487Print copy in library catalog ...
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Silicone insulation in submarines — Toxicity
Electrical Engineering, 1948Shipboard electrical installations present special problems for insulating materials that may not exist in shore installations. As naval vessels necessarily are built to a high degree of compartmentation requiring forced ventilation and also have large capacity power plants installed in relatively small spaces, there is perhaps more insulation per ...
H. P. Walker, T. E. Shea
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Silicon-on-Insulator and Porous Silicon [PDF]
, 2004 Silicon is by far the most widely used semiconductor material. It is abundant in the earth’s crust and relatively easy to convert into a high-purity single crystal. Unlike some other semiconductor materials, silicon is stable when heated at high temperature, and a well-behaved insulating and passivating material, silicon dioxide, can readily be grown ...
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Silicon Photonics: silicon nitride versus silicon-on-insulator
Optical Fiber Communication Conference, 2016Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.
Bart Kuyken +9 more
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