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Bonding of silicon wafers for silicon‐on‐insulator
Journal of Applied Physics, 1988Several aspects of a new silicon-on-insulator technique utilizing bonding of oxidized silicon wafers were investigated. The bonding was achieved by heating in an inert atmosphere a pair of wafers with hydrophilic surfaces contacted face-to-face. A quantitative method for the evaluation of the surface energy of the bond based on crack propagation theory
W P Maszara
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Frontiers of silicon-on-insulator
Journal of Applied Physics, 2003Silicon-on-insulator (SOI) wafers are precisely engineered multilayer semiconductor/dielectric structures that provide new functionality for advanced Si devices. After more than three decades of materials research and device studies, SOI wafers have entered into the mainstream of semiconductor electronics.
G K Celler, S Cristoloveanu, Celler G K
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SILICON ON INSULATOR TECHNOLOGY
International Journal of High Speed Electronics and Systems, 1999Silicon On Insulator (SOI) has been developed to accompany the CMOS technology and take the relay when bulk silicon faces processing frontiers. Such limitations have not occurred quickly enough, therefore SOI remains restricted to niche applications, essentially in the field of radiation-hard integrated circuits. It has been a long wait.
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Silicon Photonics: silicon nitride versus silicon-on-insulator
Optical Fiber Communication Conference, 2016Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.
Baets, Roel G. +9 more
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Silicone insulation in submarines — Toxicity
Electrical Engineering, 1948Shipboard electrical installations present special problems for insulating materials that may not exist in shore installations. As naval vessels necessarily are built to a high degree of compartmentation requiring forced ventilation and also have large capacity power plants installed in relatively small spaces, there is perhaps more insulation per ...
H. P. Walker, T. E. Shea
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Silicon photonics beyond silicon-on-insulator
Journal of Optics, 2017The standard platform for silicon photonics has been ridge or channel waveguides fabricated on silicon-on-insulator (SOI) wafers. SOI waveguides are so versatile and the technology built around it is so mature and popular that silicon photonics is almost regarded as synonymous with SOI photonics.
Chiles, Jeff, Fathpour, Sasan
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Silicon-on-Insulator Architectures for Brillouin scattering
Proceedings of the 2022 Conference on Lasers and Electro-Optics Pacific Rim, 2022We report Brillouin scattering gain in two novel Silicon-on-Insulator architectures – double slab and double-lobed waveguides. We show that the geometrical parameters influence the Brillouin gain and frequency shift, thereby offering flexibility to maximize gain.
B Om Subham +4 more
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Physics Bulletin, 1985
There has always been interest in the growth of silicon–on–insulators (soi), usually on sapphire, to give increased resistance to nuclear radiation for space and military applications. However, recently, new techniques for growth have been researched, and the silicon device interest has widened as the potential of insulating substrates for use with ...
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There has always been interest in the growth of silicon–on–insulators (soi), usually on sapphire, to give increased resistance to nuclear radiation for space and military applications. However, recently, new techniques for growth have been researched, and the silicon device interest has widened as the potential of insulating substrates for use with ...
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Biosensors in silicon on insulator
SPIE Proceedings, 2009We present several nanophotonic biosensors on silicon-on-insulator: ring resonator based devices, slotted ring resonators to increase the interaction between light and the sample, and finally devices based on nanoplasmonic interferometers.
Peter Bienstman +6 more
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