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Novel silicon-on-insulator structures for silicon waveguides
IEEE SOS/SOI Technology Conference, 2003Summary form only given. The authors discuss optical waveguiding at a wavelength of 1.3 microns in a separation by implantation of oxygen (SIMOX) sample with a silicon top layer about two microns thick on a buried SiO/sub 2/ layer about 4000 AA thick.
E. Cortesi, F. Namavar, R.A. Soref
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Silicon-on-diamond: An advanced silicon-on-insulator technology
Diamond and Related Materials, 2005Abstract Silicon-on-diamond (SOD) technology is proposed as an advanced alternative to conventional silicon-on-insulator (SOI) technology. In SOD, the electrical insulator is diamond, the best thermal conductor in nature. In our SOD concept, the diamond film is highly oriented (HOD), 75–100 μm thick and serves as an electrical insulator, heat ...
A. Aleksov +6 more
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Analysis of porous silicon silicon-on-insulator materials
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991Abstract Silicon-on-insulator materials are being used in the development of radiation hard VLSI electronic circuits and one promising route is the use of porous silicon. Porous silicon is produced by electrochemically etching selected regions of silicon wafers to produce volumes of highly reactive porous silicon which can be converted to dielectric ...
L.G. Earwaker +4 more
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Semiconductors, 2005
The effect of additional implantation of hydrogen ions into the region of the interface between the split-off silicon layer and the buried insulator in silicon-on-insulator structures and subsequent high-temperature annealing on the parameters of the structures and their radiation resistance is studied.
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The effect of additional implantation of hydrogen ions into the region of the interface between the split-off silicon layer and the buried insulator in silicon-on-insulator structures and subsequent high-temperature annealing on the parameters of the structures and their radiation resistance is studied.
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Silicon-on-Insulator Waveguides
2013While developed for the needs of microelectronics, the silicon-on-insulator (SOI) wafers are excellent substrates for optical waveguides. SOI is a kind of structures formed by a thin layer of crystalline silicon (Si) on an insulating layer, which typically is silicon dioxide (SiO2).
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