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Silicon-on-Insulator Waveguides
2013While developed for the needs of microelectronics, the silicon-on-insulator (SOI) wafers are excellent substrates for optical waveguides. SOI is a kind of structures formed by a thin layer of crystalline silicon (Si) on an insulating layer, which typically is silicon dioxide (SiO2).
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Optical Characterization of Silicon-On-Insulator
MRS Proceedings, 1996AbstractA new technique, referred to as the “n&k Method”, is used to characterize the thin films comprising Silicon-on-Insulator (SOI). With the “n&k Method”, a non-destructive robust measurement of the thickness of both the crystalline silicon top-layer and the buried oxide under-layer, the spectra of refractive index (n), and extinction ...
A. Auberton-Herve+4 more
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Silicones for outdoor insulator maintenance [PDF]
This paper reviews outdoor insulator contamination problems and presents the variety of silicone based maintenance solutions from a historical perspective, from early silicone greases to the latest RTV elastomer products. Results of a current study on commercially available RTV coatings is compared in terms of specifications, actual uncured and cured ...
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Recrystallization of amorphous silicon on insulator
Materials Chemistry and Physics, 1993Abstract The structure and morphology as well as the etch velocity of silicon on silicon nitride are studied prior to and after zone melting recrystallization by observing the transmission electron micrographs and diffraction patterns.
G.D. Beshkov, N.B. Velchev
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Semiconductors, 2005
The effect of additional implantation of hydrogen ions into the region of the interface between the split-off silicon layer and the buried insulator in silicon-on-insulator structures and subsequent high-temperature annealing on the parameters of the structures and their radiation resistance is studied.
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The effect of additional implantation of hydrogen ions into the region of the interface between the split-off silicon layer and the buried insulator in silicon-on-insulator structures and subsequent high-temperature annealing on the parameters of the structures and their radiation resistance is studied.
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Silicone coating project [insulators]
Conference Record of 1995 Annual Pulp and Paper Industry Technical Conference, 2002An account of Public Service Company of Oklahoma's (PSO's) experience with substation insulator and bushing surface contamination prevention is described. The wet flashovers of high voltage insulators and bushings exposed to a corrosive atmosphere are discussed. Frequent washing and silicone coating solutions are compared.
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Silicon-on-Insulator for VLSI and VHSIC
1982Publisher Summary This chapter addresses the application of silicon-on-insulator (SOI) structures to very large-scale integrated (VLSI) circuits based on micro-structures whose dimensions are in the neighborhood of one micron and less. This class of integrated circuits also includes those circuits planned in the very high-speed integrated circuit ...
H.W. Lam, R.F. Pinizzotto, A.F. Tasch
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Insulating Silicon Nitride Films
1991In insulating silicon nitride films, the dielectrical properties of silicon nitride are of primary importance, whereas in encapsulating and passivating silicon nitride films, the chemical barrier properties are utilized. Of course, the same film can serve more than one application.
Eberhard F. Krimmel+3 more
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Splendid isolation [silicon on insulator]
Engineering & Technology, 2006This paper discusses the growing popularity of silicon on insulator (SOI) technology in the semiconductor industry over the past few years. Of the total share of SOI wafer sales, a small percentage goes to SIMOX (separation by implanted oxygen) process while a large 80% goes to the rival technology developed at Grenoble-based LETI, called Smart Cut ...
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