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METHOD OF ETCHING A TRENCH IN A SILICON-ON-INSULATOR (SOI) STRUCTURE
2004NALLAN PADMAPANI C +3 more
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A method of manufacturing an SOI (Silicon On Insulator) wafer
2002KWON YONG-BUM, LEE JONG-HYUN
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Process for thinning the active silicon layer of a substrate of “silicon on insulator” (SOI) type
2013BOEDT FRANCOIS, KERDILES SEBASTIEN
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Semiconductor device on a combination bulk silicon and silicon-on-insulator (SOI) substrate
2004CHEN HOWARD H, HSU LOUIS L, WANG LI-KONG
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