Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride. [PDF]
Knapp M +3 more
europepmc +1 more source
Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants. [PDF]
Anggraini SA +4 more
europepmc +1 more source
The 2026 guided acoustic waves roadmap. [PDF]
Krenner HJ +51 more
europepmc +1 more source
Porous silicon bulk acoustic wave resonator with integrated transducer. [PDF]
Aliev GN +5 more
europepmc +1 more source
Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes. [PDF]
Rughoobur G +4 more
europepmc +1 more source
Experimental system design for the integration of trapped-ion and superconducting qubit systems. [PDF]
De Motte D +10 more
europepmc +1 more source
An Overview of High Frequency Acoustic Sensors-QCMs, SAWs and FBARs-Chemical and Biochemical Applications. [PDF]
Mujahid A, Afzal A, Dickert FL.
europepmc +1 more source
The film bulk acoustic resonator (FBAR) is an emerging piezoelectric device, widely spreading for sensing applications and in many commercial products like cell phones for its high working frequency and small size.
Hamida Hallil, Corinne Dejous
exaly +2 more sources
Particle Sensor Using Solidly Mounted Resonators [PDF]
This paper describes the development of a novel particle sensing system employing zinc oxide based solidly mounted resonator (SMR) devices for the detection of airborne fine particles (i.e., PM2.5 and PM10). The system operates in a dual configuration in
Jan Theunis +2 more
exaly +2 more sources
A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring
This work presents a novel Solidly Mounted Resonator (SMR) device for use in a portable, low-cost and low power air quality monitor. The acoustic mirror, an essential part of the SMR device for energy confinement, is fabricated within a CMOS process, and
Enrique Iborra +2 more
exaly +2 more sources

