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An Overview of High Frequency Acoustic Sensors-QCMs, SAWs and FBARs-Chemical and Biochemical Applications. [PDF]
Mujahid A, Afzal A, Dickert FL.
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Sensors and Actuators B: Chemical, 2012
Abstract Novel chemical sensor based on film bulk acoustic resonators (FBARs), in the solidly mounted resonator (SMR) configuration, exploiting three polymer sensitive layers deposited by laser-induced forward transfer (LIFT) are reported. The resonators operate at a frequency of 2 GHz and consist of a piezoelectric aluminium nitride film “sandwiched”
Cannatà +15 more
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Abstract Novel chemical sensor based on film bulk acoustic resonators (FBARs), in the solidly mounted resonator (SMR) configuration, exploiting three polymer sensitive layers deposited by laser-induced forward transfer (LIFT) are reported. The resonators operate at a frequency of 2 GHz and consist of a piezoelectric aluminium nitride film “sandwiched”
Cannatà +15 more
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P1J-7 Solidly Mounted Resonator (SMR) FEM-BEM Simulation
2006 IEEE Ultrasonics Symposium, 2006Solidly Mounted Resonators (SMR) are alternatives to membrane resonators to realize Bulk Acoustic Wave (BAW) filters for RF communication systems. SMR decoupling from substrate, which is realized with a multi-layered Bragg reflector, has a major influence on resonator performance (quality factor, spurious modes).
A. Volatier, B. Dubus, D. Ekeom
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2018 IEEE International Frequency Control Symposium (IFCS), 2018
The performance characteristic of Bulk Acoustic Wave (BAW) resonators is strongly determined by their mechanical and electrical losses. Extrinsic losses are mainly induced by viscous and ohmic losses of the electrode. The ideal electrode material is a highly conductive and light material, which at first glance might comprise a conflict of objectives ...
Marius Knapp +3 more
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The performance characteristic of Bulk Acoustic Wave (BAW) resonators is strongly determined by their mechanical and electrical losses. Extrinsic losses are mainly induced by viscous and ohmic losses of the electrode. The ideal electrode material is a highly conductive and light material, which at first glance might comprise a conflict of objectives ...
Marius Knapp +3 more
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2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022
Yang Yang, Corinne Dejous, Hamida Hallil
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Yang Yang, Corinne Dejous, Hamida Hallil
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2023 International Conference on Computer, Electronics & Electrical Engineering & their Applications (IC2E3), 2023
Vinita Vinita, Jitendra Singh
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Vinita Vinita, Jitendra Singh
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Fabrication of a 3.5-GHz Solidly Mounted Resonator by Using an AlScN Piezoelectric Thin Film
Coatings, 2021chan-yu chung, Kuo-Sheng Kao
exaly
2025 26th International Conference on Electronic Packaging Technology (ICEPT)
Xitong Wang +8 more
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Xitong Wang +8 more
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