Results 11 to 20 of about 389,974 (331)
Advances in Flexible Thermoelectric Materials and Devices Fabricated by Magnetron Sputtering
Small Science, 2023 Due to the direct conversion between thermal and electrical energy, thermoelectric materials and their devices exhibit great potential for power generation and refrigeration.
Boxuan Hu +8 more
semanticscholar +1 more source
Total and Differential Sputtering Yields Explored by SRIM Simulations
Coatings, 2022 Total sputtering yield and spatial distributions of sputtered atoms are important for numerous deposition techniques. We performed SRIM (Stopping and Range of Ions in Matter) simulations to analyze the total sputtering yield and angular distribution of ...
N. Mahne, M. Čekada, M. Panjan
semanticscholar +1 more source
Physics and technology of magnetron sputtering discharges
Plasma Sources Science & Technology, 2020 Magnetron sputtering deposition has become the most widely used technique for deposition of both metallic and compound thin films and is utilized in numerous industrial applications.
J. Gudmundsson
semanticscholar +1 more source
Materials Research Express, 2020 We report a comprehensive study on influence of oxygen partial pressure on NiO thin films grown on glass substrates in a combined argon and oxygen ambience by reactive dc magnetron sputtering.
P. Salunkhe, Muhammed Ali A V, D. Kekuda
semanticscholar +1 more source
Novel sputtering-technology for grain-size control [PDF]
, 2004 In this paper, we present a description of a novel high-rate plasma sputtering system that allows the control of grain size in sputtered films. Additionally, the system has the advantage of a better utilization of the target material (around 80% to 90 ...
Grundy, P J +4 more
core +1 more source
Crystals, 2022 Thin films of Ti-Al-Cr-N were deposited onto glass substrates by means of the reactive magnetron co-sputtering of pure Cr and TiAl alloy targets in an atmosphere of Ar and N2.
Gina Prieto-Novoa +4 more
doaj +1 more source
Dust cloud evolution in sub-stellar atmospheres via plasma deposition and plasma sputtering [PDF]
, 2017 Context. In contemporary sub-stellar model atmospheres, dust growth occurs through neutral gas-phase surface chemistry. Recently, there has been a growing body of theoretical and observational evidence suggesting that ionisation processes can also occur.
Diver, D. A., Stark, C. R.
core +4 more sources
Sputtering yield measurements at glancing incidence using a quartz crystal microbalance [PDF]
, 2007 Low energy sputtering yields at grazing incidence have been investigated experimentally using a quartz crystal microbalance (QCM) technique. This method involved precoating the QCM with a thin film of the desired target material and relating the ...
Goebel, Dan +3 more
core +1 more source
Origin of Ferroelectric Phase in Undoped HfO2 Films Deposited by Sputtering
Advanced Materials Interfaces, 2019 Thin film metal–insulator–metal capacitors with undoped HfO2 as the insulator are fabricated by sputtering from ceramic targets and subsequently annealed.
T. Mittmann +13 more
semanticscholar +1 more source
Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering
, 2020 Copper oxides (CuO, Cu2O) have promising application potential in sensors or solar cells. In this study, copper oxide thin films were prepared by reactive DC magnetron sputtering using helicon plasma.
Anmar H. Shukor, H. Alhattab, I. Takano
semanticscholar +1 more source