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Statistics of sputtering

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
Abstract The statistics of the emission of sputtered particles is investigated with the Monte Carlo program TRIM SP. The probability of sputtering N atoms with N ≧ 0 per single projectile is determined for a wide range of projectile target combinations (mass ratio), incident ion energies and angles.
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Sputter shadowing

Journal of Ultrastructure Research, 1984
A device has been constructed which allows specimens to be shadowed in a conventional sputter water. This process of sputter shadowing lends to specimens a contrast suitable for imaging in the transmission electron microscope (TEM). The process has the practical advantages over metal evaporation shadowing of lower instrumentation costs, less user ...
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Sputtering of CuPt Alloy

Moscow University Physics Bulletin, 2023
The paper reports the results of an experimental study of sputtering of a polycrystalline CuPt alloy irradiated with Ar+ ions with energies of 20 keV and 80 keV. The sputtering yield of the alloy was measured using Rutherford backscattering of He+ ions with an energy of 2 MeV.
V.S. Chernysh   +2 more
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The sputtering process and sputtered ion emission

Surface Science, 1979
Abstract In this review an attempt is made to delineate those physical characteristics of the sputtering event which are of importance for the discussion of sputtered ion emission. Emphasis is placed on the grossly disordered nature of the sputtering site as the sputtered atoms depart.
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sputter

2022
"Sputter" lyrically divulges the turbulence and emotional upheaval of queer youth, documenting the complicated nature of adolescence, transformation, age, sex and generational trauma.
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Measurement of sputtering by sputter deposition method

Physics Letters A, 1989
Abstract Sputtering with energetic ion bombardment is investigated by measuring the angular distribution of ejected material and by analyzing the bombarded sample surface with Auger electron spectroscopy (AES). The results show that the ejection events strongly depend upon type, fluence and energy of the bombarding ions and sputtering environments ...
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Fundamentals of Sputtering

1984
From a user’s point of view, one would wish that a secondary-ion-mass-spectroscopic (SIMS) signal [1,2] S be given by S=YP, where Y is a sputter yield and P an ionization probability. As we all know, things are more complex. As a next step, one could write schematically $$S\left( {x,y} \right) = \smallint dz Y\left( {x;y,z} \right) P\left( {y,z ...
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Recent neutron sputtering results and the status of neutron sputtering☆

Journal of Nuclear Materials, 1976
Abstract Extensive (d, t) and (d, Be) fast neutron sputtering results obtained by Batelle-Northwest are summarized for Nb and Au. The measured sputtering ratios are in the range of 10 −5 atoms/fast neutron. These results are compared to other available experimental results and to theoretical estimates.
O.K. Harling   +3 more
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Sputtering of tungsten by carbon

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
Abstract The sputtering of tungsten by carbon is investigated experimentally and by computer simulation. The erosion and deposition is studied as a function of the fluence of the incident carbon at 1 and 6 keV and for different angles of incidence.
Eckstein, W., Roth, J.
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Sputtering of tungsten and molybdenum

Journal of Nuclear Materials, 1991
Abstract The relatively low sputtering yield and large thermal conductivity make refractory materials like molybdenum and tungsten attractive from the viewpoint of their applicability as limiter or/and divertor materials in fusion machines. A drawback is the high sensitivity of the plasma to heavy (high atomic number) impurities. The present paper is
Eckstein, W., Laszlo, J.
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