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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
The magnetic confinement of a hot plasma as investigated in fusion research is limited. Plasma particles bombard the vessel walls and release wall atoms by sputtering. These atoms represent impurities, which cool the plasma by radiation, and may thus prevent the ignition of a Dt-plasma.
Behrisch, R. +3 more
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The magnetic confinement of a hot plasma as investigated in fusion research is limited. Plasma particles bombard the vessel walls and release wall atoms by sputtering. These atoms represent impurities, which cool the plasma by radiation, and may thus prevent the ignition of a Dt-plasma.
Behrisch, R. +3 more
openaire +2 more sources
A sputtering calculation: Angular dependence of sputtering yields
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1998Abstract The material erosion induced by physical sputtering resulted from bombardments of hydrogen, helium and their isotopes is a critical problem for fusion technique. An important feature for such ion-induced sputtering is isotropic incidence condition.
Luo Zhengming, Hou Qing, Teng Lijian
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Annals of the New York Academy of Sciences, 1955
Publisher Summary This chapter discusses various methods for measuring sputtering by ion bombardment such as the glow discharge, low pressure glow discharge with magnetic field, low pressure supported plasmas, and ion beam methods. Information about sputtering depends on a reliable measurement of the yield S (number of released atoms per impinging ...
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Publisher Summary This chapter discusses various methods for measuring sputtering by ion bombardment such as the glow discharge, low pressure glow discharge with magnetic field, low pressure supported plasmas, and ion beam methods. Information about sputtering depends on a reliable measurement of the yield S (number of released atoms per impinging ...
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Determination of the sputtering rate by the fluorescence of sputtered atoms
Journal of Applied Physics, 1973An rf sputtering apparatus was equipped with an optical spectrometer with which the characteristic lines of sputtered species were observed. A specially designed CaO disk or a thin CaO layer on a quartz plate were used as the targets. It was observed that the intensity of the calcium peak increased more rapidly than the thicknesses of the films ...
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Materials and structure engineering by magnetron sputtering for advanced lithium batteries
Energy Storage Materials, 2021Yitian Ma, Ji Qian, Wenjie Qu
exaly
Total and Differential Sputtering Yields Explored by SRIM Simulations
Coatings, 2022Matjaz Panjan
exaly
Magnetron sputtering: a review of recent developments and applications
Vacuum, 2000P J Kelly, R D Arnell
exaly