Results 1 to 10 of about 6,876,800 (337)

Prediction of Target Erosion for Planar Magnetron Sputtering Systems

open access: yesCoatings, 2022
Based on the analysis of the correlation between plasma glow and the magnetic field over a magnetron target, a model for predicting the shape of the target erosion of MSS is proposed. The magnetic field distribution is obtained upon direct measurement or calculation using the ELCUT software, which allows one to calculate the magnetic field based on the
Alexander Kolesnikov   +3 more
openaire   +2 more sources

Small-bubble gas injection to mitigate cavitation-induced erosion damage and reduce strain in target vessels at the Spallation Neutron Source

open access: yesMaterials & Design, 2022
The effectiveness of small-bubble gas injection to mitigate cavitation-induced erosion damage and decrease strain in Spallation Neutron Source (SNS) target vessels was characterized using photography, laser-line scanning, and in-situ vessel strain ...
David A. McClintock   +11 more
doaj   +3 more sources

Curved-boundary particle-in-cell simulation for the investigation of the target erosion effect of DC magnetron sputtering system

open access: yesAIP Advances, 2020
A two-dimensional particle-in-cell simulation with a curved-boundary field solver makes it possible to investigate the target erosion effects in a direct current magnetron sputtering system.
Young Hyun Jo   +3 more
doaj   +2 more sources

Experimental study on the effect of impact target distance on coal breaking efficiency of high-pressure gas–liquid two-phase jet [PDF]

open access: yesScientific Reports
The effective impact target distance is one of the key parameters determining whether high-pressure gas–liquid two-phase jet technology can be applied in underground coal breaking and permeability enhancement projects. To investigate the effect of target
Yang Li
doaj   +2 more sources

MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION

open access: yesActa Polytechnica, 2016
This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the ...
Alena Olegovna Borduleva   +3 more
doaj   +3 more sources

Cavitation erosion: Using the target material as a pressure sensor [PDF]

open access: yesJournal of Applied Physics, 2015
Numerical prediction of mass loss due to cavitation erosion requires the knowledge of the hydrodynamic impact loads generated by cavitation bubble collapses. Experimental measurements of such impact loads using conventional pressure sensors are not reliable (if not impossible) due to the micron size and the very small duration of the loading.
Samir Chandra Roy   +2 more
openaire   +3 more sources

Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems

open access: yesCoatings, 2023
Improving the target erosion uniformity in a commercial direct current (DC) magnetron sputtering system is a crucial issue in terms of process management as well as enhancing the properties of the deposited film. Especially, nonuniform target erosion was
Y. Jo   +3 more
semanticscholar   +1 more source

Operating modes and target erosion in high power impulse magnetron sputtering

open access: yesJournal of Vacuum Science & Technology A, 2022
Magnetron sputtering combines a glow discharge with sputtering from a target that simultaneously serves as a cathode for the discharge. The electrons of the discharge are confined between overarching magnetic field lines and the negatively biased cathode.
Martin Rudolph   +6 more
semanticscholar   +1 more source

2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion [PDF]

open access: yesJournal of Applied Sciences and Nanotechnology, 2022
In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target.
Ali Addie   +2 more
doaj   +1 more source

Study on Wear Properties of the Graphite-Sealing Surfaces in a Triple Eccentric Butterfly Valve Based on EDEM-Fluent Coupling

open access: yesMachines, 2023
When using valves and pipes, erosion wear is a major issue. Erosion wear can result in equipment shutdown, material replacement, and other issues, as well as the failure of sealing surfaces.
Shuxun Li   +5 more
doaj   +1 more source

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