Results 251 to 260 of about 6,876,800 (337)

Anginal Symptoms in Patients With Type 2 Myocardial Infarction: Insights From the TARGET-Type 2 Trial. [PDF]

open access: yesJACC Adv
Piya S   +6 more
europepmc   +1 more source

The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties

Surface and Coatings Technology, 2020
Magnetron sputter deposited Mo-based thin films are widely used as diffusion barriers and metallization layers for signal and data bus lines of flat panel displays or back electrodes of thin film solar cells. These films are deposited at large-scale from
Martin Rausch   +9 more
semanticscholar   +3 more sources

Modeling target erosion during reactive sputtering

Applied Surface Science, 2015
Abstract The influence of the reactive sputter conditions on the racetrack and the sputter profile for an Al/O2 DC reactive sputter system is studied by modeling. The role of redeposition, i.e. the deposition of sputtered material back on the target, is therefore taken into account.
K. Strijckmans, D. Depla
openaire   +2 more sources

Rectangular magnetron with full target erosion

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1999
The article reports on the operation of a rectangular magnetron with three and four closed discharges simultaneously formed on the surface of sputtered target. The closed discharges, elliptically shaped with the longer axis perpendicular to the long side of the rectangular magnetron, are formed using magnetic circuits placed behind the sputtered target.
J. Musil
openaire   +2 more sources

Target Erosion Pattern in Planar Magnetron Sputtering

Japanese Journal of Applied Physics, 1982
Two methods for visualizing the target erosion pattern in the planar magnetron sputtering system are described here. The experimental results obtained by one of the new methods reveal that there exists a threshold vertical magnetic field corresponding to the erosion pattern boundaries.
Tatsuo Fukami, Toshiyuki Sakuma
openaire   +2 more sources

Magnetic null discharge sputtering with full target erosion

Surface and Coatings Technology, 2005
The article reports on the operation of a novel-type sputtering system based on the magnetic null discharge concept for the thin film fabrication process. The unique feature of the system is the plasma production around the magnetic null field region on the target surface.
Y. Sung
openaire   +2 more sources

Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films

Surface and Coatings Technology, 2018
The use of Mo in large area thin film deposition includes back contact layers for thin film solar cells as well as diffusion barriers and source/drain electrodes in microelectronics and relies on its excellent thermal stability and chemical inertness as ...
A. Hofer-Roblyek   +5 more
semanticscholar   +3 more sources

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