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Experimental and Modeling-Based Approaches for Mechanistic Understanding of Pan Coating Process-A Detailed Review. [PDF]
PharmaceuticsAminahmadi B +7 more
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Gaussian Process-Based Multi-Fidelity Bayesian Optimization for Optimal Calibration Point Selection. [PDF]
Sensors (Basel)Zhuo H +6 more
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Control of temperature uniformity in the temperature chamber with centrifugal acceleration
Journal of Process Control, 2014Abstract A novel method for control of temperature uniformity in the combined environmental testing is proposed. The structure of the temperature test chamber is introduced and the multi-input multi-output (MIMO) temperature control system is designed, in which the plant is approximated by the first-order plus time delay (FOPTD) model.
Wen He
exaly +2 more sources
Temperature uniformity in RTP furnaces
IEEE Transactions on Electron Devices, 1990The heat transfer to a wafer in a RTP furnace is simulated by an analytical/numerical model. The model includes radiant heat transfer to the wafer from the lamps, the heat conduction within the wafer, and the emission of radiation from the wafer. Geometric optics are used to predict the radiant heat flux distribution over the wafer. The predicted wafer
F. Y. Sorrell +3 more
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RTP temperature uniformity mapping
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991Abstract This paper presents innovative software developed to help generate a temperature calibration curve and to mathematically manipulate and combine multi-point wafer maps. The software automatically applies the calibration curve to a map of film parameters to provide a quantitative map of temperature uniformity.
W.A. Keenan +3 more
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