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Temperature uniformity in RTP furnaces

IEEE Transactions on Electron Devices, 1990
The heat transfer to a wafer in a RTP furnace is simulated by an analytical/numerical model. The model includes radiant heat transfer to the wafer from the lamps, the heat conduction within the wafer, and the emission of radiation from the wafer. Geometric optics are used to predict the radiant heat flux distribution over the wafer. The predicted wafer
F. Y. Sorrell   +3 more
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RTP temperature uniformity mapping

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
Abstract This paper presents innovative software developed to help generate a temperature calibration curve and to mathematically manipulate and combine multi-point wafer maps. The software automatically applies the calibration curve to a map of film parameters to provide a quantitative map of temperature uniformity.
W.A. Keenan   +3 more
openaire   +1 more source

Effect of Temperature and Temperature Uniformity on Plasma and Device Stability

MRS Proceedings, 2003
AbstractWe have investigated the changes in the cathode potential in a dc discharge of silane and hydrogen used to deposit the intrinsic layer of p-i-n type solar cells at deposition rates from 1 to 10Å/s with the superstrate temperature at 200°C and 250°C.
G. Ganguly   +3 more
openaire   +1 more source

Effect of uniform and non-uniform skin temperature on thermal exchanges in water in humans

International Journal of Biometeorology, 2002
We investigated the effect of uniform (UST) and non-uniform (NUST) skin temperature on thermal exchanges during a 3-h water immersion in five male subjects wearing (NUST) or not wearing (UST) a water-perfused garment. UST was achieved by immersing the nude subject in water up to the neck.
Jang Kyu, Choi   +3 more
openaire   +2 more sources

Uniform Temperature Cylindrical Furnace

IEEE Transactions on Industry Applications, 1976
A method of calculating the variation in temperature along the axis of a uniformly wound cylindrical furnace is given. Methods have been suggested for obtaining a predetermined field of temperature, including uniform temperature in a furnace. The following has been shown.
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Interaction of Bonded Plates in a Uniform Temperature Field

Journal of Mathematical Sciences
zbMATH Open Web Interface contents unavailable due to conflicting licenses.
Glagolev, V. V.   +2 more
openaire   +1 more source

Germanium Photodiodes - Temperature And Uniformity Effects

SPIE Proceedings, 1985
Longwave fiber optic systems require accurate power measurements in the spectral region from 1.0 to 1.6 microns. We have studied the characteristics of germanium photodiodes with the hope that these devices might achieve the accuracy, stability, and dynamic range in the longwave region that silicon photodiodes have achieved in the shortwave region.1'2 ...
Robert Rickenbach, Paul Wendland
openaire   +1 more source

High-temperature creep under a non-uniform temperature distribution

Journal of Materials Science Letters, 1989
Abstract : This report analyzes an example of creep in a material under a nonuniform temperature distribution, and uses simple but realistic assumptions for that distribution and for the material creep properties as a function of temperature. This analysis was motivated by measurements of creep at high temperatures in unidirectional, fibrous carbon ...
L. A. Feldman, T. B. Bahder
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Dual characterization method of temperature uniformity and fluctuation for refrigerator: Experiment, methodology, and improvement [PDF]

open access: yesAEJ - Alexandria Engineering Journal
Temperature uniformity and temperature fluctuation are two important parameters of refrigerator and have significant effects on fresh-keeping and cold-storage technology.
Xiaohui Chen
exaly   +2 more sources

Design of Uniform Temperature Controller based on Temperature Difference Model

IFAC Proceedings Volumes, 2008
Abstract Thermal distribution in manufacturing processes, which is observed in both steady and transient states, causes inferior quality. Thus, uniform temperature control is extremely required in many industrial application fields for quality improvement.
Nobutomo MATSUNAGA   +2 more
openaire   +1 more source

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