Results 21 to 30 of about 1,337 (176)
DEStech Transactions on Environment, Energy and Earth Sciences, 2017 Tetramethylammonium hydroxide is used in the electronic industry during the photolithography process to produce memories. The effluent produced in this process must be treated before discharging due its toxicity. The aim of this research is to evaluate the feasibility of biological treatment to remove this molecule from the effluent by aerobic process ...
Ida De Michelis +3 more
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Influence of surface free energy of underlayer on the dissolution of resist film in tetramethylammonium hydroxide (TMAH) aqueous solution [PDF]
International Conference on Extreme Ultraviolet Lithography 2023, 2023 Jiahao Wang +2 more
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Data in Brief, 2022 Densities for various Tetramethylammonium hydroxide (TMAH) solutions at different temperatures have been determined based on Archimedes’ principle using a hydrostatic balance and a vitreous body with a defined volume. Due to the toxicity of the compound,
Josef Diebold +3 more
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Effective suppression of interface states in recessed-gate MIS-HEMTs by TMAH wet etching
Applied Physics Express, 2023 The effect of tetramethylammonium hydroxide (TMAH) treatment prior to gate dielectric deposition on the performance of recessed-gate AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) was investigated.
Yu Li +11 more
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An alternative method for the determination of siloxane activities toward basic equilibration catalysts [PDF]
Journal of the Serbian Chemical Society, 2005 The method used is based on the well-known fact that siloxane equilibrates once formed, do not change their compositions unless some siloxane compound is added, in which case new equilibrium compositions appear.
Govedarica Milutin N.
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Mathematical modeling of transesterification process kinetics of triglycerides catalyzed by TMAH [PDF]
MATEC Web of Conferences, 2019 Biodiesel is a renewable fuel mainly produced by methylation of triglycerides of vegetable oils or animal fats. The production processes nowadays are particularly based on the utilization of inorganic alkali catalysts. However, it has been proved that an
Šánek Lubomír +3 more
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Investigating the Effects of Gel Casting Parameters on the Suspension Rheology and Mechanical Properties of Titanium Carbide Green Body [PDF]
Archives of Metallurgy and Materials, 2018 In this paper the chemo-rheological behavior of aqueous TiC suspension and physical properties of gelcasted green body were investigated. The monomer system used in this project was acrylamide (AM) and methylenebisacrylamide (MBAM).
H. Foratirad +2 more
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Influence of underlayer on development of chemically amplified photoresist film in tetramethylammonium hydroxide (TMAH) aqueous developer [PDF]
Japanese Journal of Applied PhysicsAbstract The interactions between the underlayer and photoresist significantly affect the dissolution behavior and patterns formed in the photoresist during development. Therefore, it is important to analyze the dissolution behavior of a photoresist with an underlayer.
Jiahao Wang, Takahiro Kozawa
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Nanomaterials, 2019 We demonstrated that the tetramethylammonium hydroxide (TMAH) solution possesses different etching abilities to the chip sidewalls with different orientations because the orientation of chip sidewall determines the exposed crystallographic plane of ...
Hui Wan +5 more
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Nanomaterials, 2021 The tetramethylammonium hydroxide (TMAH)-controlled alkaline etching of nickel hexacyanoferrate (NiHCF) mesocrystals is explored. The alkaline etching enables the formation of hollow framework structures with an increased surface area, the exposure of ...
Sascha Keßler +3 more
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