Results 291 to 293 of about 2,309,761 (293)

Thermal atomic layer etching processes

2019
BLOMBERG TOM E, SHARMA VARUN, HAUKKA SUVI, TUOMINEN MARKO, ZHU CHIYU   +4 more
openaire   +10 more sources

Atomic layer etching in continuous plasma

2018
TAN ZHONGKUI, ZHANG YITING, WU YING, XU QING, FU QIAN, YAMAGUCHI YOKO, CUI LIN   +6 more
openaire   +1 more source

Atomic layer etching by electron wavefront

ANZ SAMIR JOHN, MARGOLESE DAVID IRWIN, GODDARD WILLIAM ANDREW, SANDO STEWART FRANCIS   +3 more
openaire   +2 more sources