Results 281 to 290 of about 2,309,761 (293)

Electron excitation atomic layer etch

2023
BERRY III IVAN L, LILL THORSTEN, FISCHER ANDREAS   +2 more
openaire   +1 more source

Atomic layer etching processes

2019
BLOMBERG TOM E, SHARMA VARUN, HAUKKA SUVI P, TUOMINEN MARKO J, ZHU CHIYU   +4 more
openaire   +5 more sources

Designer atomic layer etching

2020
openaire   +3 more sources

Enhancement of thermal atomic layer etching

2020
GEORGE STEVEN MCCLELLAN, JOHNSON NICHOLAS RAY, DUMONT JAIME WILLADEAN, MARQUARDT AMY ELIZABETH, LEE YOUNGHEE, ZYWOTKO DAVID RICHARD, ABDULAGATOV AZIZ   +6 more
openaire   +1 more source

High energy atomic layer etching

2020
YANG WENBING, TAN SAMANTHA, MUKHERJEE TAMAL, KANARIK KEREN JACOBS, PAN YANG   +4 more
openaire   +1 more source

Method for removing a contamination layer by an atomic layer etching process

2019
ROOZEBOOM FRED, EHM DIRK HEINRICH, ILLIBERI ANDREA, BECKER MORITZ, TE SLIGTE EDWIN, CREIJGHTON YVES LODEWIJK MARIA   +5 more
openaire   +2 more sources

Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)

2017
KANARIK KEREN JACOBS, MARKS JEFFREY, SINGH HARMEET, TAN SAMANTHA, KABANSKY ALEXANDER, YANG WENBING, KIM TAESEUNG, HAUSMANN DENNIS M, LILL THORSTEN   +8 more
openaire   +4 more sources

Etch selectivity control in atomic layer etching

FISCHER ANDREAS, LILL THORSTEN BERND
openaire   +1 more source

Atomic layer etching of metal oxides

2022
openaire   +1 more source

ENHANCEMENT OF THERMAL ATOMIC LAYER ETCHING

2018
GEORGE STEVEN MCCLELLAN, JOHNSON NICHOLAS RAY, DUMONT JAIME WILLADEAN, MARQUARDT AMY ELIZABETH, LEE YOUNGHEE, ZYWOTKO DAVID RICHARD   +5 more
openaire   +1 more source