Results 261 to 270 of about 2,309,761 (293)

Predicting etch characteristics in thermal etching and atomic layer etching

2022
LILL THORSTEN, FISCHER ANDREAS, BERRY III IVAN L, DRAEGER NERISSA SUE, GOTTSCHO RICHARD A   +4 more
openaire   +1 more source

Atomic Layer Etching

2016
openaire   +1 more source

Predicting synergy in atomic layer etching Open Access

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Wenbing Yang, Keren J Kanarik, Jeffrey Marks   +2 more
exaly  

Method for atomic layer etching

2016
RANJAN ALOK, SHERPA SONAM, WANG MINGMEI
openaire   +2 more sources

Atomic-layer etching of Ge using an ultraclean ECR plasma

Applied Surface Science, 1997
Junichi Murota, Takashi Matsuura
exaly  

Competition between Al2O3 atomic layer etching and AlF3 atomic layer deposition using sequential exposures of trimethylaluminum and hydrogen fluoride Free

Journal of Chemical Physics, 2017
Steven M. George, Jaime W Dumont
exaly  

Methods for wet atomic layer etching of copper

2023
NETZBAND CHRISTOPHER, ABEL PAUL, FAGUET JACQUES, SITARAM ARKALGUD   +3 more
openaire   +2 more sources

(Tutorial) Thermal Atomic Layer Etching

ECS Meeting Abstracts, 2021
openaire   +1 more source

Realization of atomic layer etching of silicon Available to Purchase

Journal of Vacuum Science & Technology B, 1996
Demetre J. Economou
exaly  

Thermal etching of AlF3 and thermal atomic layer etching of Al2O3 Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Younghee Lee, Steven M. George, Thorsten Lill   +2 more
exaly