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Layer by Layer Etching of the Highly Oriented Pyrolythic Graphite by Using Atomic Layer Etching

Journal of The Electrochemical Society, 2011
The layers of exfoliation graphene obtained by scotch taping of highly oriented pyrolythic graphite could be controlled precisely using an atomic layer etching (ALET) technology. Using the ALET, that is, by adsorbing oxygen radicals chemically on the graphene surface during the adsorption step and by removing the chemisorbed species only by Ar particle
Y. Y. Kim, W. S. Lim, J. B. Park, G. Y. Yeom +3 more
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Realization of atomic layer etching of silicon

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1996
An experimental system and methodology were developed to realize dry etching of single crystal silicon with monolayer accuracy. Atomic layer etching of silicon is a cyclic process composed of four consecutive steps: reactant adsorption, excess reactant evacuation, ion irradiation, and product evacuation. When successful, completion of one cycle results
Satish D. Athavale, Demetre J. Economou
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Depoisoning Catalysts by Atomic Layer Etching

ChemCatChem
Abstract To improve the sustainability of transition metal catalysts, which suffer from deactivation through poisoning when exposed to sulfur‐containing compounds, atomic layer etch (ALE)—a technique studied predominantly by the microelectronics and semiconductor communities—is explored as a method of regenerating
Taylor G. Smith +7 more
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Thermal atomic layer etching: A review Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2021
Steven M. George, Thorsten Lill, Andreas Fischer +2 more
exaly

Universal scaling relationship for atomic layer etching Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2021
Wenbing Yang, Keren J Kanarik, Richard A. Gottscho +2 more
exaly

Atomic layer etching of metals

2021
DEEPAK NITIN, GORADIA PRERNA SONTHALIA
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Plasma atomic layer etching of molybdenum with surface fluorination

Applied Surface Science, 2023
Sung Min Cho, Yongjae Kim, Heeyeop Chae
exaly

METHODS AND SYSTEMS FOR ATOMIC LAYER ETCHING AND ATOMIC LAYER DEPOSITION

2022
GREER HAROLD FRANK +3 more
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Atomic layer etching

2023
DEZELAH CHARLES, SHARMA VARUN
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