Results 251 to 260 of about 2,309,761 (293)

Scaling of atomic layer etching of SiO2 in fluorocarbon plasmas: Transient etching and surface roughness

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2021
Mark Kushner, Xifeng Wang
exaly  

Plasma enhanced atomic layer etching of high-k layers on WS2 Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2022
Jean-François de Marneffe, Souvik Kundu, Andy Goodyear   +2 more
exaly  

Low-Damage and Self-Limiting (Al)GaN Etching Process through Atomic Layer Etching Using O2 and BCl3 Plasma

Coatings, 2021
IlHwan Hwang, Ho-Young Cha, Kwang-Seok Seo   +2 more
exaly  

Atomic Layer Etching - Breaking Through the Limitation of Etch

Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials, 2018
K. Nojiri, K.J. Kanarik, S. Tan, E.A. Hudson, R.A. Gottscho   +4 more
openaire   +1 more source

Atomic layer etching of Si3N4 with high selectivity to SiO2 and poly-Si Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2021
Kazunori Shinoda, Nobuya Miyoshi
exaly  

Overview of atomic layer etching in the semiconductor industry Open Access

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2015
Keren J Kanarik, Richard A. Gottscho, Thorsten Lill   +2 more
exaly  

Plasma atomic layer etching using conventional plasma equipment Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2009
Mark Kushner
exaly  

Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions

ACS Nano, 2016
Younghee Lee, Steven M. George
exaly  

Comparative study of two atomic layer etching processes for GaN

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020
Christophe Durand, Christophe Vallée, Etienne Gheeraert   +2 more
exaly  

Fluorocarbon assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2014
Dominik Metzler, Eric Joseph, Robert Bruce   +2 more
exaly