Results 271 to 280 of about 2,309,761 (293)

CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES

2023
GARCIA DE GORORDO ALVARO, YAO ZHONGHUA, SRINIVASAN SUNIL, PARK SANG WOOK   +3 more
openaire   +2 more sources

Cryo atomic layer etching of SiO2 by C4F8 physisorption followed by Ar plasma

Applied Physics Letters, 2019
Gaëlle Antoun, Thomas Tillocher, Rémi Dussart   +2 more
exaly  

Atomic layer etching in close-to-conventional plasma etch tools Available to Purchase

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Andy Goodyear
exaly  

ATOMIC LAYER ETCHING ON MICRODEVICES AND NANODEVICES

2017
GEORGE STEVEN M, BRIGHT VICTOR M, BROWN JOSEPH J, GERTSCH JONAS, EIGENFELD NATHAN THOMAS, SKIDMORE GEORGE   +5 more
openaire   +2 more sources

Atomic Layer Etching: Directional

2016
openaire   +1 more source

Method for etching atomic layer of graphene

2014
YEOM GEUN YOUNG, LIM WOONG SUN, MIN KYUNG SEOK, KIM YI YEON, OH JONG SIK   +4 more
openaire   +2 more sources

Atomic layer etching with pulsed plasmas

2013
DONNELLY VINCENT M, ECONOMOU DEMETRE J
openaire   +2 more sources

Atomic layer etching of tantalum

2020
KANARIK KEREN JACOBS, KIM TAESEUNG
openaire   +1 more source

CONTROL OF DIRECTIONALITY IN ATOMIC LAYER ETCHING

2018
FISCHER ANDREAS, LILL THORSTEN, JANEK RICHARD   +2 more
openaire   +4 more sources

Atomic layer etching using acid halide

2019
KATO KOREHITO, FUKAE KATSUYA, TAKAHASHI YOSHINAO   +2 more
openaire   +4 more sources