Results 171 to 180 of about 523 (205)
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Parameter study for silicon grass formation in Bosch process
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2010Bosch process is one type of silicon etching technology for high-aspect ratio where silicon grass is one of the by-products. Previously, most of the studies have been focused on eliminating these silicon grasses. However, in this study, the optimized condition for obtaining silicon grasses was studied using inductively coupled plasma reactive ion ...
Caroline Sunyong Lee +2 more
exaly +2 more sources
A modified Bosch-type process for precise surface micromachining of polysilicon
Journal of Micromechanics and Microengineering, 2002We report on the study of a new plasma process for precise surface micromachining of polysilicon. The principle is based on the adaptation of the well-known Bosch process to polysilicon, alternating etch and passivation steps under inductively coupled plasmas (ICPs).
Quevy, E. +5 more
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Cross-section control of stacked nanowires formed by Bosch process and oxidation
2010 3rd International Nanoelectronics Conference (INEC), 2010The cross-sectional shape of the stacked silicon nanowires (SiNWs) formed by the Bosch process and stress-limited oxidation is studied in this paper. Under the condition of high temperature oxidation, the resulting nanowires highly resemble the initial shapes resulting by the Bosch process.
Chan Mansun
exaly +3 more sources
2022
Industry 4.0 takes advantage of data-driven approaches to improve manufacturing processes. Root cause analysis (RCA) techniques are naturally required to support the identification of reasons for (in)efficiency processes. However, RCA methods tend to be sensitive to data perturbations and outliers, compromising the confidence of the results and ...
Ângela F. Brochado +2 more
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Industry 4.0 takes advantage of data-driven approaches to improve manufacturing processes. Root cause analysis (RCA) techniques are naturally required to support the identification of reasons for (in)efficiency processes. However, RCA methods tend to be sensitive to data perturbations and outliers, compromising the confidence of the results and ...
Ângela F. Brochado +2 more
openaire +2 more sources
Optimization of Bosch etch process for through wafer interconnects
Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488), 2004The Bosch etch process was utilized to create 50 micrometer vias with an aspect ration of 10:1 in silicon wafers for through wafer interconnects. The process is complex with twenty-two separate parameters required to control the process. Deviating from the standard process and flowing SF/sub 6/ during the deposition process resulted in a more stable ...
L. Kenoyer, R. Oxford, A. Moll
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Bosch: Process Mining—A Corporate Consulting Perspective
2020As a large corporation and global player, Bosch has several Process Mining use cases implemented, in different business divisions, across different continents, and in various process types, e.g. P2P, O2C, production, and ticketing. The Bosch Process Mining setup can be characterized as a top-management-driven central approach. Planning and execution is
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Haber-Bosch and Other Industrial Processes
2004The Haber process, in the past more often referred to as the Haber-Bosch process, is one of the towering achievements of industrial chemistry. It has enabled us to produce enough nitrogen fertiliser to feed the current world population, to provide enough explosive to fight as many minor wars as seems desirable to desperate enough people, and to be able
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(Invited) Ammonia Production Beyond Haber-Bosch Process
ECS Meeting Abstracts, 2019Ammonia has been an important chemical precursor for agriculture and other applications for about a century. It is estimated that about 180 million tons of ammonia is produced annually, and over 90% of the ammonia is produced via the Haber-Bosch (HB) process.
Liangzhu Zhu +4 more
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Simulation of the Bosch process with a string–cell hybrid method
Journal of Micromechanics and Microengineering, 2004This paper presents a new two-dimensional (2D) simulator, which can simulate the etching polymerization alternation in the Bosch process for an infinite trench. Physical models for etching and deposition are developed. Having been implemented with these models and a string–cell hybrid method based on string structure and cell structure, this simulator ...
Rongchun Zhou +3 more
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An overview of the Haber-Bosch Process for Ammonia Production
2023Ramdhaw, Kiara +2 more
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