Nanoscale Surface Refinement of CoCrMo Alloy for Artificial Knee Joints via Chemical Mechanical Polishing. [PDF]
Zhang H +7 more
europepmc +1 more source
Research on Chemical Mechanical Polishing Technology for Zirconium-Based Amorphous Alloys. [PDF]
Hang W +7 more
europepmc +1 more source
New Atomistic Insights on the Chemical Mechanical Polishing of Silica Glass with Ceria Nanoparticles. [PDF]
Brugnoli L +4 more
europepmc +1 more source
Objectives: Single crystal silicon carbide (SiC) is known for its high hardness and high chemical inertness, making it chanllenging to process effectively using traditional chemical mechanical polishing (CMP) methods.
Zhibin GU +4 more
doaj +1 more source
Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies. [PDF]
Hsieh CH +5 more
europepmc +1 more source
The Effects of Precursors on the Morphology and Chemical Mechanical Polishing Performance of Ceria-Based Abrasives. [PDF]
Zheng Y +6 more
europepmc +1 more source
Polymer Nanoparticles Applied in the CMP (Chemical Mechanical Polishing) Process of Chip Wafers for Defect Improvement and Polishing Removal Rate Response. [PDF]
Chiu WL, Huang CI.
europepmc +1 more source
Dispersion and Polishing Mechanism of a Novel CeO2-LaOF-Based Chemical Mechanical Polishing Slurry for Quartz Glass. [PDF]
Zhao Z +9 more
europepmc +1 more source
Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State. [PDF]
Zhang S +6 more
europepmc +1 more source
Atomic-level flatness on oxygen-free copper surface in lapping and chemical mechanical polishing. [PDF]
Liu D +8 more
europepmc +1 more source

