Results 61 to 70 of about 18,025 (163)

Material Removal Characteristics of Abrasive-Free Cu Chemical-Mechanical Polishing (CMP) Using Electrolytic Ionization via Ni Electrodes. [PDF]

Micromachines (Basel), 2023
Lee H.
europepmc   +1 more source

Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices. [PDF]

Materials (Basel), 2023
Shi X, Lu Y, Chaussende D, Rottwitt K, Ou H.   +4 more
europepmc   +1 more source

A magnetically controlled chemical-mechanical polishing (MC-CMP) approach for fabricating channel-cut silicon crystal optics for the High Energy Photon Source. [PDF]

J Synchrotron Radiat, 2023
Hong Z, Diao Q, Xu W, Yuan Q, Yang J, Li Z, Jiang Y, Zhang C, Zhang D, Liu F, Zhang X, Liu P, Tao Y, Sheng W, Li M, Zhao Y.   +15 more
europepmc   +1 more source

Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline Silicon. [PDF]

Materials (Basel), 2022
Xia J, Yu J, Lu S, Huang Q, Xie C, Wang Z.   +5 more
europepmc   +1 more source

Research on the Application of Diamond Film in Chemical Mechanical Polishing. [PDF]

Nanomaterials (Basel)
Wang Y, Zhang X, Guo F, Zhang M, Sun X, Zhang L, Xia G, Chai X, Wang S, Zhou X, Gai Z.   +10 more
europepmc   +1 more source

Photo-oxidative degradation of polyacids derived ceria nanoparticle modulation for chemical mechanical polishing. [PDF]

Sci Rep, 2022
Kim E, Hong J, Seok H, Kim T.
europepmc   +1 more source

Integration Technology for Wafer-Level LiNbO₃ Single-Crystal Thin Film on Silicon by Polyimide Adhesive Bonding and Chemical Mechanical Polishing. [PDF]

Nanomaterials (Basel), 2021
Geng W, Yang X, Xue G, Xu W, Bi K, Mei L, Zhang L, Hou X, Chou X.   +8 more
europepmc   +1 more source

Chemical Mechanical Polishing of Plasma-Modified Cu/Polymer Interfaces for Advanced Hybrid Bonding. [PDF]

Adv Sci (Weinh)
Kang S, Jeon C, Park J, Park S, Kim KM, Kim S.   +5 more
europepmc   +1 more source

A Comprehensive Review of the Nano-Abrasives Key Parameters Influencing the Performance in Chemical Mechanical Polishing. [PDF]

Nanomaterials (Basel)
Bellahsene H, Sene S, Félix G, Larionova J, Ferrari M, Guari Y.   +5 more
europepmc   +1 more source

Controllable Synthesis of Monodisperse CeO₂ Nanoparticles with Tunable Sizes for Chemical-Mechanical Polishing. [PDF]

ACS Omega
Ma Y, Qiu T, Zhao Z, Zou Q, Chen B, Sun Q, Zhao S.   +6 more
europepmc   +1 more source